Abstract: Processes and apparatus for the separation of gaseous mixtures used in sterilization processes are disclosed, particularly in which the gaseous mixtures include ethylene oxide and a relative inert secondary gas component, such as various chlorofluorocarbons. The processes disclosed include providing water as a solvent for the ethylene oxide, mixing the gaseous mixture with the water to produce a liquid phase comprising the ethylene oxide at least partially dissolved in the water, and the gas phase comprising the secondary gaseous component which is less soluble in the water than the ethylene oxide, removing the gas phase from the liquid phase for further processing, separating the ethylene oxide from the water in the liquid phase, and recycling the water for subsequent use as solvent.