Abstract: A device for gripping a load including first and second frame portions, a translation for moving the frame, first and second gripping arms mounted on the first and second frame portions, respectively, so as to move a load, and a width-adjustment for adapting a width of the first and second gripping arms. The width adjustment includes first locking/unlocking elements that lock the first frame portion relative to the path of travel, second locking/unlocking elements that unlock the second frame portion relative to the first frame portion, and a translation that moves the second frame portion along the path of travel.

Abstract: An automatic locker device configured for a distribution of goods includes at least one storage area for the storage of loads including or formed by the goods, at least one retrieval point for the retrieval of the goods, and a handling device. The retrieval point includes a box having faces that are closed except for one open lateral face, having a first aperture oriented towards the exterior of the device, and an open lower face having a second aperture. The handling device is configured to shift one of the loads from the storage area towards the retrieval point and the vertically shift the load towards or through the second aperture of the open lower face, up to a height making it possible, through the first aperture of the open lateral face, to make available at least one of the goods included in or forming said load.

Abstract: An automatic locker device configured for a distribution of goods includes at least one storage area for the storage of loads including or formed by the goods, at least one retrieval point for the retrieval of the goods, and a handling device. The retrieval point includes a box having faces that are closed except for one open lateral face, having a first aperture oriented towards the exterior of the device, and an open lower face having a second aperture. The handling device is configured to shift one of the loads from the storage area towards the retrieval point and the vertically shift the load towards or through the second aperture of the open lower face, up to a height making it possible, through the first aperture of the open lateral face, to make available at least one of the goods included in or forming said load.

Abstract: A treatment device for transport and storage boxes according to the invention comprises a plurality of decontamination modules (24-27) supported by a common chassis (100) and arranged in a row of at least one column (23c) of modules superposed one on top of the other. Each decontamination module (24-27) comprises its own pumping means (6) having at least a primary pump (8a) housed in a primary pumping compartment (8c) that is longitudinally offset from the decontamination chamber (5). Access to the decontamination modules (24-27) is had via side access doors which are all oriented on one and the same access side and which are acted upon by actuating means that automatically close and open them. A lateral transfer zone is provided on the access side, and comprises a robot (29) capable of moving the transport and storage boxes between a frontal loading-unloading station (23a) and the decontamination chambers (5) of each of the decontamination modules (24-27).

Abstract: The aim of the invention is to provide a method for the treatment of a transport support (1) for the conveyance and storage of semiconductor substrates, with said support (1) possibly having first undergone a cleaning operation using a liquid. The method includes a treatment stage in which the transport support (1) is placed in a sealed chamber (4) connected to a vacuum pump (5) and said transport support (1) is subjected to the combined action of a subatmospheric pressure and infrared radiation to favor the removal of foreign bodies on the walls of the transport support (1). The invention also concerns a treatment station for a transport support (1) for implementation of the method.

Abstract: A treatment device for transport and storage boxes according to the invention comprises a plurality of decontamination modules (24-27) supported by a common chassis (100) and arranged in a row of at least one column (23c) of modules superposed one on top of the other. Each decontamination module (24-27) comprises its own pumping means (6) having at least a primary pump (8a) housed in a primary pumping compartment (8c) that is longitudinally offset from the decontamination chamber (5). Access to the decontamination modules (24-27) is had via side access doors which are all oriented on one and the same access side and which are acted upon by actuating means that automatically close and open them. A lateral transfer zone is provided on the access side, and comprises a robot (29) capable of moving the transport and storage boxes between a frontal loading-unloading station (23a) and the decontamination chambers (5) of each of the decontamination modules (24-27).

Abstract: The invention concerns a measurement station for the measurement of particle contamination of a transport pod for the conveyance and atmospheric storage of semiconductor substrates, such pod comprising a casing capable of being closed by means of a removable access door, such station comprising: an interface (5) capable of coupling to a casing of a transport pod (3) instead of the said door, the interface (5) comprising at least one injection nozzle (9) arranged at one mobile end of a pipe protruding from the said interface to direct a jet of gas in a perpendicular direction towards a portion of the wall (13) on the inside (10) of the said casing coupled to the said measurement station, so as to detach particles (11) from the said casing (3) by the impact of the gas jet on the said wall (13), and a measurement device (7) comprising a vacuum pump (17), a particle counter (19), and a measurement conduit (21) of which an inlet (23) leads to the inside (10) of the said casing (3), and of which an outlet (25) i

Abstract: A transport pod interface in one example including a sampling probe connected to a gas analyzer and an actuator coupled with an access door on the transport pod in the coupling position, and that moves said door towards the base of the interface in an retracted position in which the volume of gas to be analyzed contained within the transport pod is accessible by the sampling probe, characterized in that it includes at least one sealing joint configured such that at least when the interface is in the retracted position, the space between the actuator and said base is sealed in such a way as to isolate the volume of gas to be analyzed.

Abstract: The invention relates to a station for measuring gaseous pollution in a transport enclosure of semiconductor substrates comprising a gas analysis device for determining the concentration of the gas to be analysed, said analysis device including: a diluting unit (3) configured to dilute a flow of gas to be analysed (Q) according to a dilution coefficient (D), and an analysis unit (5) communicating with the diluting unit (3) via a sampling pipe (7) in order to sample a flow of diluted gas (Qa) by pumping, and comprising at least one processing means for: analysing the sampled flow of diluted gas (Qa), and determining the concentration (C) of the gas flow to be analysed (Q) according to said analysed flow of diluted gas (Qa) and the dilution coefficient (D). The invention further relates to an associated gas analysis method.

Abstract: The invention concerns a measurement station for the measurement of particle contamination of a transport pod for the conveyance and atmospheric storage of semiconductor substrates, such pod comprising a casing capable of being closed by means of a removable access door, such station comprising: an interface (5) capable of coupling to a casing of a transport pod (3) instead of the said door, the interface (5) comprising at least one injection nozzle (9) arranged at one mobile end of a pipe protruding from the said interface to direct a jet of gas in a perpendicular direction towards a portion of the wall (13) on the inside (10) of the said casing coupled to the said measurement station, so as to detach particles (11) from the said casing (3) by the impact of the gas jet on the said wall (13), and a measurement device (7) comprising a vacuum pump (17), a particle counter (19), and a measurement conduit (21) of which an inlet (23) leads to the inside (10) of the said casing (3), and of which an outlet (25) i

Abstract: The aim of the invention is to provide a method for the treatment of a transport support (1) for the conveyance and storage of semiconductor substrates, with said support (1) possibly having first undergone a cleaning operation using a liquid. The method includes a treatment stage in which the transport support (1) is placed in a sealed chamber (4) connected to a vacuum pump (5) and said transport support (1) is subjected to the combined action of a subatmospheric pressure and infrared radiation to favor the removal of foreign bodies on the walls of the transport support (1). The invention also concerns a treatment station for a transport support (1) for implementation of the method.

Abstract: The goal of the present invention is to provide an apparatus capable of cooperation with at least one piece of wafer processing equipment, comprising leak proof walls comprising a first opening comprising means for the connection to a first equipment chosen from between a transfer chamber and a processing chamber, a second opening comprising means of connection to a wafer transport case containing a basket, comprising a series of stacked parallel trays suitable for storing a wafer each, the basket being susceptible of being transported inside the apparatus, means of moving the basket from and to the transport case, and means for immobilizing the trays. The apparatus further comprises a third opening comprising means for the connection to a second piece of equipment chosen from between an EFEM module and a transfer chamber, and means for the placement and support of a wafer capable of working together with movement means for the wafer enabling its passage through the second opening and/or the third opening.

Abstract: According to the invention, a transport box ‘1) may be connected to an interface (2) and contain a basket ‘3) in which the substrates (4) may be placed. The basket (3) consists of a set of plates (3a-3f), stacked one after the other and individually replaceable. The basket (3) is entirely shifted to the interior of the interface (2), then the means of movement isolating a selected plate by moving the adjacent places, allowing the robot (5) to come and extract the selected substrate. When in a transport position, the plates (3a-3f) are in contact with each other, therefore reducing the amount of space taken up by the substrates (4).

Abstract: In apparatus of the invention, a transport pod (1) can be coupled to an article-passing opening (11) of process equipment (9) in leaktight manner with sealing being provided by an interposed interface peripheral gasket (16). The pod door (4) can be secured selectively to the interface door (12) so that they can be moved together as a unit along an axial stroke followed by a transverse stroke under drive from door actuator means (14). The transport pod (1) is held by retaining means (15). The peripheral volume (21) around the two doors can be pumped out by means of a pump (22) and a duct (23). The pod door (4) can be locked on the transport door (1) by locking means (20) that guarantee good sealing while the transport pod (1) is separate from the process equipment (9). This ensures good sealing of the transport pod (1), and enables the doors (4, 12) to be opened under a vacuum without polluting the inside atmosphere.

Abstract: The invention pertains to a transport pod interface including a sampling probe intended to be connected to a gas analyzer and an actuator that can couple with an access door on the transport pod in the coupling position, and that can move said door towards the base of the interface in an retracted position in which the volume of gas to be analyzed contained within the transport pod can be accessed by the sampling probe, characterized in that it includes at least one sealing joint configured so as to ensure that at least when the interface is in the retracted position, the space between the actuator and said base is sealed in such a way as to isolate the volume of gas to be analyzed.

Abstract: In apparatus of the invention, a transport pod (1) can be coupled to an article-passing opening (11) of process equipment (9) in leaktight manner with sealing being provided by an interposed interface peripheral gasket (16). The pod door (4) can be secured selectively to the interface door (12) so that they can be moved together as a unit along an axial stroke followed by a transverse stroke under drive from door actuator means (14). The transport pod (1) is held by retaining means (15). The peripheral volume (21) around the two doors can be pumped out by means of a pump (22) and a duct (23). The pod door (4) can be locked on the transport door (1) by locking means (20) that guarantee good sealing while the transport pod (1) is separate from the process equipment (9). This ensures good sealing of the transport pod (1), and enables the doors (4, 12) to be opened under a vacuum without polluting the inside atmosphere.