Patents by Inventor Erwann Picard

Erwann Picard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR PROVIDING MATERIAL ON A DEPOSITION SURFACE
    Publication number: 20110177233
    Abstract: The invention relates to an apparatus (100) for providing a layer of a material from a precursor gas on a deposition surface (112) of a substrate (110). The apparatus includes a deposition chamber (102) and a trap surface (116) for trapping reactive constituents of the precursor gas, the trap surface (116) being arranged such that at least part of the precursor gas flows from a precursor gas inlet (104) along the trap surface (116) before reaching the deposition surface (112) of the substrate (110).
    Type: Application
    Filed: January 18, 2008
    Publication date: July 21, 2011
    Applicant: NXP, B.V.
    Inventor: Erwann Picard