Patents by Inventor Erwin Antonius Alphen

Erwin Antonius Alphen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for determining a map, device manufacturing method, and lithographic apparatus
    Publication number: 20050134865
    Abstract: A method according to one embodiment of the invention includes determining a map of a first part of a substrate belonging to a group of substrates. The method includes measuring a second part of at least one substrate belonging to the group, the second part being at least partially overlapping with the first part; computing a map (e.g. an average profile map or average height map) of the first part of the substrate belonging to the group, based on the second part; and storing the computed map, e.g. for use during a later determination of a height or tilt of a substrate from the group.
    Type: Application
    Filed: December 17, 2003
    Publication date: June 23, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Hielke Schoonewelle, Marcus Boonman, Ralph Brinkhof, Martin Jules Marie-Emile Nivelle, Jan Stoeten, Erwin Antonius Alphen