Patents by Inventor Erwin Antonius Henricus Franciscus VAN DEN BOOGAERT

Erwin Antonius Henricus Franciscus VAN DEN BOOGAERT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus
    Patent number: 10114299
    Abstract: A lithographic apparatus has a compartment which accommodates a movable object. Movements of the movable object cause acoustic disturbances in the compartment. An acoustic damper is arranged to damp the acoustic disturbances in the compartment and comprises a chamber (100) in communication with the compartment and a perforated plate (101), having a plurality of through-holes (102), between the chamber and the compartment.
    Type: Grant
    Filed: May 7, 2015
    Date of Patent: October 30, 2018
    Assignee: ASML Netherlands B.V.
    Inventors: Günes Nakiboglu, Mark Constant Johannes Baggen, Gerard Johannes Boogaard, Nicolaas Rudolf Kemper, Sander Kerssemakers, Robertus Mathijs Gerardus Rijs, Frank Johannes Jacobus Van Boxtel, Erwin Antonius Henricus Franciscus Van Den Boogaert, Marc Wilhelmus Maria Van Der Wijst, Martinus Van Duijnhoven, Jessica Henrica Anna Verdonschot, Hendrikus Herman Marie Cox
  • Lithographic Apparatus
    Publication number: 20170090296
    Abstract: A lithographic apparatus has a compartment which accommodates a movable object. Movements of the movable object cause acoustic disturbances in the compartment. An acoustic damper is arranged to damp the acoustic disturbances in the compartment and comprises a chamber (100) in communication with the compartment and a perforated plate (101), having a plurality of Cthrough-holes (102), between the chamber and the compartment.
    Type: Application
    Filed: May 7, 2015
    Publication date: March 30, 2017
    Applicant: ASML Netherlands B.V.
    Inventors: Günes NAKIBOGLU, Mark Constant Johannes BAGGEN, Gerard Johannes BOOGAARD, Nicolaas Rudolf KEMPER, Sander KERSSEMAKERS, Robertus Mathijs Gerardus RIJS, Frank Johannes Jacobus VAN BOXTEL, Erwin Antonius Henricus Franciscus VAN DEN BOOGAERT, Marc Wilhelmus Maria VAN DER WIJST, Martinus VAN DUIJNHOVEN, Jessica Henrica Anna VERDONSCHOT, Hendrikus Herman Marie COX