Patents by Inventor Erwin Bugl

Erwin Bugl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for the deposition of pure semiconductor material
    Patent number: 4311545
    Abstract: The invention relates to a method and device for making pure semiconductor aterial by thermal decomposition of compounds of the semiconductor material on suitable carrier elements. The quantity and quality of the obtained semiconductor material is increased in accordance with the invention by introducing the compounds to be decomposed into the reactor chamber in at least a partially liquid state through a nozzle having a plurality of discharge openings.
    Type: Grant
    Filed: March 3, 1980
    Date of Patent: January 19, 1982
    Assignee: Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH
    Inventors: Erwin Bugl, Rudolf Griesshammer, Helmut Lorenz, Helmut Hamster, Franz Koppl