Patents by Inventor Erwin Grund

Erwin Grund has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patterning of Sensitive Metal-Containing Layers With Superior Mask Material Adhesion by Providing a Modified Surface Layer
    Publication number: 20130126984
    Abstract: When patterning metal-containing material layers, such as titanium nitride, in critical manufacturing stages, for instance upon forming sophisticated high-k metal gate electrode structures or providing hard mask materials for patterning a metallization system, the surface adhesion of a resist material on the titanium nitride material may be improved by applying a controlled oxidation process.
    Type: Application
    Filed: November 22, 2011
    Publication date: May 23, 2013
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Berthold Reimer, Martin Trentzsch, Erwin Grund, Sven Beyer