Patents by Inventor Erwin Van Alphen

Erwin Van Alphen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for determining a map, device manufacturing method, and lithographic apparatus
    Publication number: 20080046183
    Abstract: A method according to one embodiment of the invention includes determining a map of a second part of a substrate belonging to a group of substrates. The method includes measuring a first part of at least one substrate belonging to the group to create an average profile map or average height map and computing a map of the second part of the substrate belonging to the group, based on the average profile map or the average height map. The computed map is stored for use during a later determination of a height or tilt of a substrate from the group.
    Type: Application
    Filed: October 15, 2007
    Publication date: February 21, 2008
    Applicant: ASML Netherlands B.V.
    Inventors: Hielke Schoonewelle, Marcus Boonman, Ralph Brinkhof, Martin De Nivelle, Jan Stoeten, Erwin Van Alphen