Patents by Inventor Erxuan Zhao

Erxuan Zhao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10707130
    Abstract: Systems and methods for dicing a sample by a Bessel beam matrix are disclosed. The method for dicing a sample by a Bessel beam matrix may comprise generating a Bessel beam matrix including multiple Bessel beams arranged in a matrix form, according to a predetermined dicing layout of the sample; controlling a focus position of each Bessel beam in the generated Bessel beam matrix; and focusing simultaneously the Bessel beams of the Bessel beam matrix at the respective controlled focus positions within the sample for dicing.
    Type: Grant
    Filed: March 5, 2018
    Date of Patent: July 7, 2020
    Assignee: The Chinese University of Hong Kong
    Inventors: Shih-Chi Chen, Hiu Hung Lee, Dapeng Zhang, Erxuan Zhao, Yina Chang, Dihan Chen
  • Publication number: 20190273025
    Abstract: Systems and methods for dicing a sample by a Bessel beam matrix are disclosed. The method for dicing a sample by a Bessel beam matrix may comprise generating a Bessel beam matrix including multiple Bessel beams arranged in a matrix form, according to a predetermined dicing layout of the sample; controlling a focus position of each Bessel beam in the generated Bessel beam matrix; and focusing simultaneously the Bessel beams of the Bessel beam matrix at the respective controlled focus positions within the sample for dicing.
    Type: Application
    Filed: March 5, 2018
    Publication date: September 5, 2019
    Inventors: Shih-Chi Chen, Hiu Hung Lee, Dapeng Zhang, Erxuan Zhao, Yina Chang, Dihan Chen