Patents by Inventor Ethan E. Mattor

Ethan E. Mattor has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Capacitance manometer with improved baffle for improved detection accuracy
    Patent number: 11287342
    Abstract: A capacitive manometer offering improved measurement accuracy is disclosed which includes at least one electrode structure having an inner electrode structure and an outer electrode structure separated by at least one gap, at least one flexible diaphragm having at least one conductive material positioned thereon or integrated therein may be positioned in movable relation to the electrode structure and in proximity to the electrode structure, and at least one non-planar baffle less prone to transient measurement errors having an inner baffle structure and an outer baffle structure separated by at least one baffle orifice positioned distantly from the electrode structure proximate to the flexible diaphragm.
    Type: Grant
    Filed: March 20, 2020
    Date of Patent: March 29, 2022
    Assignee: MKS Instruments, Inc.
    Inventors: Philip W. Sullivan, Sergei Syssoev, Ethan E. Mattor, Swaminathan Venkatesan, Paul D. Lucas