Patents by Inventor Ethan Scott Simon

Ethan Scott Simon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9475168
    Abstract: The polishing pad is suitable for polishing or planarizing at least one of semiconductor, optical and magnetic substrates. The polishing pad has a polishing surface, an opening through the polishing pad and a transparent window within the opening in the polishing pad. The transparent window has a concave surface with a depth that increases with use of the polishing pad. A signal region slopes downward into the central region for facilitating debris removal and a debris drainage groove extending through the central region into the polishing pad. Rotating the polishing pad with polishing fluid in the debris drainage groove sends debris from the central region into the polishing pad through the debris drainage groove.
    Type: Grant
    Filed: March 26, 2015
    Date of Patent: October 25, 2016
    Inventors: Bainian Qian, Ethan Scott Simon, George C. Jacob
  • Publication number: 20160279757
    Abstract: The polishing pad is suitable for polishing or planarizing at least one of semiconductor, optical and magnetic substrates. The polishing pad has a polishing surface, an opening through the polishing pad and a transparent window within the opening in the polishing pad. The transparent window has a concave surface with a depth that increases with use of the polishing pad. A signal region slopes downward into the central region for facilitating debris removal and a debris drainage groove extending through the central region into the polishing pad. Rotating the polishing pad with polishing fluid in the debris drainage groove sends debris from the central region into the polishing pad through the debris drainage groove.
    Type: Application
    Filed: March 26, 2015
    Publication date: September 29, 2016
    Inventors: Bainian Qian, Ethan Scott Simon, George C. Jacob
  • Patent number: 8697239
    Abstract: The polishing pad is suitable for polishing patterned semiconductor substrates containing at least one of copper, dielectric, barrier and tungsten. The polishing pad includes a polymeric matrix; and the polymeric matrix being a polyurethane reaction product of a polyol blend, a polyamine or polyamine mixture and toluene diisocyanate. The polyol blend is a mixture of 15 to 77 weight percent total polypropylene glycol and polytetramethylene ether glycol; and the mixture of polypropylene glycol and polytetramethylene ether glycol having a weight ratio of the polypropylene glycol to the polytetramethylene ether glycol from a 20 to 1 ratio to a 1 to 20 ratio. The polyamine or polyamine mixture is 8 to 50 weight percent; and the toluene diisocyanate is 15 to 35 weight percent total monomer or partially reacted toluene diisocyanate monomer.
    Type: Grant
    Filed: July 24, 2009
    Date of Patent: April 15, 2014
    Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
    Inventors: Mary Jo Kulp, Ethan Scott Simon
  • Publication number: 20110021123
    Abstract: The polishing pad is suitable for polishing patterned semiconductor substrates containing at least one of copper, dielectric, barrier and tungsten. The polishing pad includes a polymeric matrix; and the polymeric matrix being a polyurethane reaction product of a polyol blend, a polyamine or polyamine mixture and toluene diisocyanate. The polyol blend is a mixture of 15 to 77 weight percent total polypropylene glycol and polytetramethylene ether glycol; and the mixture of polypropylene glycol and polytetramethylene ether glycol having a weight ratio of the polypropylene glycol to the polytetramethylene ether glycol from a 20 to 1 ratio to a 1 to 20 ratio. The polyamine or polyamine mixture is 8 to 50 weight percent; and the toluene diisocyanate is 15 to 35 weight percent total monomer or partially reacted toluene diisocyanate monomer.
    Type: Application
    Filed: July 24, 2009
    Publication date: January 27, 2011
    Inventors: Mary Jo Kulp, Ethan Scott Simon
  • Patent number: 6428844
    Abstract: A method for reducing the amount of microfoam in a spray-applied waterborne polymeric composition is provided, wherein a gas, such as, for example, carbon dioxide, having a solubility factor greater than one is used in spraying the waterborne composition. Articles so coated are also provided. And, a method for increasing the density of a spray-dried waterborne polymeric composition is provided, wherein a gas, such as, for example, carbon dioxide, having a solubility factor greater than one is used in spray-drying the waterborne composition.
    Type: Grant
    Filed: November 15, 1993
    Date of Patent: August 6, 2002
    Assignee: Rohm and Haas Company
    Inventors: Matthew Stewart Gebhard, Ethan Scott Simon
  • Patent number: 5910503
    Abstract: Stable microbicidal compositions containing a 3-isothiazolone compound, metal nitrate, bromic acid, iodic acid, periodic acid, or their salts and water are disclosed. Also disclosed are methods of preventing or reducing precipitate formation in 3-isothiazolone compositions.
    Type: Grant
    Filed: February 13, 1998
    Date of Patent: June 8, 1999
    Assignee: Rohm and Haas Company
    Inventors: John Robert Mattox, Ethan Scott Simon, Ramesh Balubhai Petigara
  • Patent number: 5821283
    Abstract: An ink composition and a method for preparing the ink composition are disclosed. The ink composition provides stability, bleed resistance and lightfastness without requiring the use of a cosolvent. The composition is based on a polymeric dispersant which is compatible with the hydrophobic surfaces of many pigments and which forms a stable dispersion of pigment in an aqueous environment. The ink composition is useful for organic and inorganic pigments.
    Type: Grant
    Filed: September 30, 1996
    Date of Patent: October 13, 1998
    Assignee: Rohm and Haas Company
    Inventors: Carl Michael Hesler, Ethan Scott Simon