Patents by Inventor Eugen Doetzel

Eugen Doetzel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230400772
    Abstract: A method for swapping an optical system, such as a DUV mirror, of a projection exposure apparatus, comprises: a) raising the optical system along a centre axis of the optical system so that mount struts of the optical system pass out of contact with frame struts of a frame carrying the optical system; b) rotating the optical system about the centre axis so that the mount struts are arranged between the frame struts; c) lowering the optical system along the centre axis; and d) shifting the optical system perpendicularly to the centre axis so that the optical system is moved out of a housing.
    Type: Application
    Filed: June 9, 2023
    Publication date: December 14, 2023
    Inventors: Eugen Doetzel, Johannes Kruis, Benjamin Sigel, Dietmar Duerr, Tobias Hegele, Alexander Ostendorf, Sebastian Henseler, Christian Beyrle, Christian Werner, Alexander Kaniut