Abstract: A laser alignment structure and method for fabrication such a structure is provided. Preferably, the same material is used throughout the alignment structure. Contrast between different areas of the alignment structure is achieved by providing areas in the structure which are relatively flat and other areas which are not relatively flat having varying topographical features. The relatively flat areas reflect impinging laser energy substantially back in the direction from which it came (e.g., in a direction substantially perpendicular to a plane defined by the surface of the structure). The relatively non-flat areas reflect relatively little, if any, laser energy in the direction from which it came. Thus, although the entire surface of the alignment structure may be reflective of laser energy, the surface topology changes from one area to another thereby effectively changing the direction of the reflected laser energy.