Patents by Inventor Eugene Mino, Jr.

Eugene Mino, Jr. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • On-axis air gage focus system
    Patent number: 5087927
    Abstract: A lithography tool having an improved focus system. The focus system comprises a lens mounted in a nosepiece which defines a chamber. The chamber defines an onifice through which the lens system may see a workpiece. An air supply is provided to supply a regulated and measured air flow to the chamber. By measuring the air flow into the chamber, the rate of air flow through the orifice may be determined. The rate of air flow through the orifice is proportional to the gap between the orifice and a workpiece.
    Type: Grant
    Filed: January 31, 1990
    Date of Patent: February 11, 1992
    Assignee: Ateo Corporation
    Inventors: Tim Thomas, Eric Christenson, Bob Holstrom, Eugene Mino, Jr.