Patents by Inventor Eugene Rabkin

Eugene Rabkin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Copper CMP slurry composition
    Patent number: 7964005
    Abstract: A composition that rapidly passivates copper-containing surface to yield a uniform layer of insoluble copper oxide, the composition being useful in chemical-mechanical planarization of copper-containing surfaces is disclosed. The composition is a solution having a pH of equal to or greater than 9 and having an oxidation potential sufficient to oxidize the surface to form non-soluble copper oxides. Also disclosed are methods of making and using the composition.
    Type: Grant
    Filed: April 4, 2004
    Date of Patent: June 21, 2011
    Assignee: Technion Research & Development Foundation Ltd.
    Inventors: Yair Ein-Eli, David Starosvetsky, Esta Abelev, Eugene Rabkin
  • Copper cmp slurry composition
    Publication number: 20070163677
    Abstract: A composition that rapidly passivates copper-containing surface to yield a uniform layer of insoluble copper oxide, the composition being useful in chemical-mechanical planarization of copper-containing surfaces is disclosed. The composition is a solution having a pH of equal to or greater than 9 and having an oxidation potential sufficient to oxidize the surface to form non-soluble copper oxides. Also disclosed are methods of making and using the composition.
    Type: Application
    Filed: July 20, 2006
    Publication date: July 19, 2007
    Inventors: Yair Ein-Eli, David Starosvetsky, Esta Abelev, Eugene Rabkin