Patents by Inventor Eugene Y Ivannov

Eugene Y Ivannov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High purity sputter targets with target end-of-life indication and method of manufacture
    Publication number: 20040020769
    Abstract: A preferred sputter target assembly (10, 10′) comprises a target (12, 12′), a backing plate (14, 14′) bonded to the target (12, 12′) along an interface (22, 22′) and dielectric particles (20, 20′) between the target (12, 12′) and the backing plate (14, 14′). A preferred method for manufacturing the sputter target assembly (10, 10′) comprises the steps of providing the target (12, 12′) and the backing plate (14, 14′); distributing the dielectric particles (20, 20′) between mating surfaces (24, 26) of the target (12, 12′) and the backing plate (14, 14′), most preferably along a sputtering track pattern on one of the mating surfaces; and bonding the target (12, 12′) to the backing plate (14, 14′) along the mating surfaces (24, 26).
    Type: Application
    Filed: July 23, 2003
    Publication date: February 5, 2004
    Inventors: Eugene Y Ivannov, David B. Smathers, Charles E. Wickersham Jr, John E. Poole