Patents by Inventor Eugene Y. Ma
Eugene Y. Ma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7829854Abstract: A thermal imaging device including: a substrate; and an array of thermally tunable pixel elements for generating a thermal image, each thermally tunable pixel element including: a plurality of thermally tunable filter islands, each of which has a thermally tunable optical filter, wherein each of the plurality of tunable filter islands within that pixel element is thermally isolated from the other tunable filter islands within that tunable pixel element; an absorption structure for absorbing incident optical thermal energy; and a mechanical structure supporting the plurality of tunable filter islands and the absorption structure on the substrate.Type: GrantFiled: July 21, 2008Date of Patent: November 9, 2010Assignee: RedShift Systems CorporationInventors: Matthias Wagner, Shuyun Wu, Eugene Y. Ma
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Patent number: 7697192Abstract: A thin-film interference filter structure has a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.Type: GrantFiled: April 2, 2009Date of Patent: April 13, 2010Assignee: Redshift Systems CorporationInventors: Matthias Wagner, Shuyun Wu, Charles M. Marshall, Eugene Y. Ma, John F. Heanue
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Publication number: 20090195859Abstract: A thin-film interference filter structure has a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.Type: ApplicationFiled: April 2, 2009Publication date: August 6, 2009Applicant: REDSHIFT SYSTEMS CORPORATIONInventors: Matthias Wagner, Shuyun Wu, Charles M. Marshall, Eugene Y. Ma, John F. Heanue
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Patent number: 7522328Abstract: An apparatus includes a thin-film interference filter structure having a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.Type: GrantFiled: May 11, 2007Date of Patent: April 21, 2009Assignee: Redshift Systems CorporationInventors: Matthias Wagner, Shuyun Wu, Charles M. Marshall, Eugene Y. Ma, John F. Heanue
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Publication number: 20090026370Abstract: A thermal imaging device including: a substrate; and an array of thermally tunable pixel elements for generating a thermal image, each thermally tunable pixel element including: a plurality of thermally tunable filter islands, each of which has a thermally tunable optical filter, wherein each of the plurality of tunable filter islands within that pixel element is thermally isolated from the other tunable filter islands within that tunable pixel element; an absorption structure for absorbing incident optical thermal energy; and a mechanical structure supporting the plurality of tunable filter islands and the absorption structure on the substrate.Type: ApplicationFiled: July 21, 2008Publication date: January 29, 2009Applicant: REDSHIFT SYSTEMS CORPORATIONInventors: Matthias WAGNER, Shuyun WU, Eugene Y. MA
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Patent number: 7402803Abstract: A thermally tunable pixel element includes a substrate; a thermally tunable filter island; a thermal absorption structure in direct thermal contact with and extending beyond the thermally tunable filter island; and a thermal isolation structure providing a thermally isolating path between the thermal absorption structure and the substrate.Type: GrantFiled: June 7, 2006Date of Patent: July 22, 2008Assignee: Redshift Systems CorporationInventors: Matthias Wagner, Shuyun Wu, Eugene Y. Ma
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Publication number: 20080088906Abstract: An apparatus includes a thin-film interference filter structure having a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.Type: ApplicationFiled: May 11, 2007Publication date: April 17, 2008Applicant: Redshift Systems CorporationInventors: Matthias Wagner, Shuyun Wu, Charles M. Marshall, Eugene Y. Ma, John F. Heanue
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Patent number: 7002697Abstract: An optical instrument including: a thermo-optically tunable, thin film, free-space interference filter having a tunable passband which functions as a wavelength selector, the filter including a sequence of alternating layers of amorphous silicon and a dielectric material deposited one on top of the other and forming a Fabry-Perot cavity structure having: a first multi-layer thin film interference structure forming a first mirror; a thin-film spacer layer deposited on top of the first multi-layer interference structure, the thin-film spacer layer made of amorphous silicon; and a second multi-layer thin film interference structure deposited on top of the thin-film spacer layer and forming a second mirror; a lens for coupling an optical beam into the filter; an optical detector for receiving the optical beam after the optical beam has interacted with the interference filter; and circuitry for heating the thermo-optically tunable interference filter to control a location of the passband.Type: GrantFiled: August 2, 2002Date of Patent: February 21, 2006Assignee: Aegis Semiconductor, Inc.Inventors: Lawrence H. Domash, Adam M. Payne, Eugene Y. Ma, Nikolay Nemchuk, Ming Wu, Robert Murano, Steven Sherman, Matthias Wagner
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Patent number: 6985281Abstract: An optoelectronic device including a header having an upper surface and including a plurality of conducting pins extending up through the upper surface; an optical device; a tunable optical filter, wherein the optical device and the tunable optical filter are arranged in a vertical stack mounted on and extending above the upper surface of the header and wherein the tunable optical filter is electrically connected to the plurality of conducting pins; and a cap affixed to the header and along with the header defining a sealed interior containing the optical device and the tunable optical filter, wherein the cap has a top surface with a window formed therein, and wherein the window is aligned with the tunable optical filter and the optical device.Type: GrantFiled: November 27, 2002Date of Patent: January 10, 2006Assignee: Aegis Semiconductor, Inc.Inventors: Matthias Wagner, Robert Murano, Eugene Y. Ma, Steven Sherman, Lawrence H. Domash
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Patent number: 6879014Abstract: Materials suitable for fabricating optical monitors include amorphous, polycrystalline and microcrystalline materials. Semitransparent photodetector materials may be based on silicon or silicon and germanium alloys. Conductors for connecting to and contacting the photodetector may be made from various transparent oxides, including zinc oxide, tin oxide and indium tin oxide. Optical monitor structures based on PIN diodes take advantage of the materials disclosed. Various contact, lineout, substrate and interconnect structures optimize the monitors for integration with various light sources, including vertical cavity surface emitting laser (VCSEL) arrays. Complete integrated structures include a light source, optical monitor and either a package or waveguide into which light is directed.Type: GrantFiled: March 20, 2001Date of Patent: April 12, 2005Assignee: Aegis Semiconductor, Inc.Inventors: Sigurd Wagner, Matthias Wagner, Eugene Y. Ma, Adam M. Payne
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Patent number: 6670599Abstract: Materials suitable for fabricating optical monitors include amorphous, polycrystalline and microcrystalline materials. Semitransparent photodetector materials may be based on silicon or silicon and germanium alloys. Conductors for connecting to and contacting the photodetector may be made from various transparent oxides, including zinc oxide, tin oxide and indium tin oxide. Optical monitor structures based on PIN diodes take advantage of the materials disclosed. Various contact, lineout, substrate and interconnect structures optimize the monitors for integration with various light sources, including vertical cavity surface emitting laser (VCSEL) arrays. Complete integrated structures include a light source, optical monitor and either a package or waveguide into which light is directed.Type: GrantFiled: March 20, 2001Date of Patent: December 30, 2003Assignee: Aegis Semiconductor, Inc.Inventors: Sigurd Wagner, Matthias Wagner, Eugene Y. Ma, Adam M. Payne
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Publication number: 20030151818Abstract: An optoelectronic device including a header having an upper surface and including a plurality of conducting pins extending up through the upper surface; an optical device; a tunable optical filter, wherein the optical device and the tunable optical filter are arranged in a vertical stack mounted on and extending above the upper surface of the header and wherein the tunable optical filter is electrically connected to the plurality of conducting pins; and a cap affixed to the header and along with the header defining a sealed interior containing the optical device and the tunable optical filter, wherein the cap has a top surface with a window formed therein, and wherein the window is aligned with the tunable optical filter and the optical device.Type: ApplicationFiled: November 27, 2002Publication date: August 14, 2003Applicant: Aegis Semiconductor, Inc.Inventors: Matthias Wagner, Robert Murano, Eugene Y. Ma, Steven Sherman, Lawrence H. Domash
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Publication number: 20030072009Abstract: An optical instrument may include a tunable free-space filter as a wavelength selector. That optical instrument may be an optical spectrum analyzer (OSA). Indeed, the OSA may be constructed and arranged as an optical channel monitor for wavelength-division multiplexed optical communication systems. The tunable free-space filter may be a tunable thin film filter (TTFF). The TTFF may be thermo-optically tunable. The tunable filter may be a multi-layer film structure incorporating thin film semiconductor materials. The temperature, and hence the wavelength, of the TTFF may be controlled by various heating and cooling structures. Various TTFF structures are also possible. The TTFF may have a single-cavity Fabry-Perot structure or may have a multi-cavity structure. Packaging variants can also be made. Any one or more of several calibration aids can be included, such as an external source of one or more known wavelength signals, or an internal source of one or more known wavelength signals.Type: ApplicationFiled: August 2, 2002Publication date: April 17, 2003Inventors: Lawrence H. Domash, Adam M. Payne, Eugene Y. Ma, Nikolay Nemchuk, Ming Wu, Robert Murano, Steven Sherman, Matthias Wagner
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Publication number: 20020185588Abstract: Materials suitable for fabricating optical monitors include amorphous, polycrystalline and microcrystalline materials. Semitransparent photodetector materials may be based on silicon or silicon and germanium alloys. Conductors for connecting to and contacting the photodetector may be made from various transparent oxides, including zinc oxide, tin oxide and indium tin oxide. Optical monitor structures based on PIN diodes take advantage of the materials disclosed. Various contact, lineout, substrate and interconnect structures optimize the monitors for integration with various light sources, including vertical cavity surface emitting laser (VCSEL) arrays. Complete integrated structures include a light source, optical monitor and either a package or waveguide into which light is directed.Type: ApplicationFiled: March 20, 2001Publication date: December 12, 2002Inventors: Sigurd Wagner, Matthias Wagner, Eugene Y. Ma, Adam M. Payne
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Publication number: 20020145139Abstract: Materials suitable for fabricating optical monitors include amorphous, polycrystalline and microcrystalline materials. Semitransparent photodetector materials may be based on silicon or silicon and germanium alloys. Conductors for connecting to and contacting the photodetector may be made from various transparent oxides, including zinc oxide, tin oxide and indium tin oxide. Optical monitor structures based on PIN diodes take advantage of the materials disclosed. Various contact, lineout, substrate and interconnect structures optimize the monitors for integration with various light sources, including vertical cavity surface emitting laser (VCSEL) arrays. Complete integrated structures include a light source, optical monitor and either a package or waveguide into which light is directed.Type: ApplicationFiled: March 20, 2001Publication date: October 10, 2002Inventors: Sigurd Wagner, Matthias Wagner, Eugene Y. Ma, Adam M. Payne
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Publication number: 20020092963Abstract: An optical system including a steered beam, further includes a source of a light beam; a device which receives the light beam and steers it to form the steered beam; a target of the steered beam; and a semi-transparent sensor having an output signal indicative of a deviation of the steered beam from the target. A method of performing real-time control of an optical switch includes steering an optical beam onto a target within the switch; measuring a deviation of the optical beam from a nominal center of the target, while the optical beam is on the target; and correcting the direction of the optical beam to the nominal center of the target.Type: ApplicationFiled: October 19, 2001Publication date: July 18, 2002Inventors: Lawrence H. Domash, Eugene Y. Ma, Adam M. Payne, Matthias Wagner