Patents by Inventor Eugene Yuexing Zhao

Eugene Yuexing Zhao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Platen assembly having a topographically altered platen surface
    Patent number: 6712679
    Abstract: An apparatus for improving performance of a wafer polishing apparatus is described. The apparatus includes a platen in a support assembly having a plurality of fluid channels and at least one region of altered topography positioned on a portion of the platen surface.
    Type: Grant
    Filed: August 8, 2001
    Date of Patent: March 30, 2004
    Assignee: Lam Research Corporation
    Inventors: Travis R. Taylor, Cangshan Xu, Kevin T. Crofton, Eugene Yuexing Zhao
  • Platen assembly having a topographically altered platen surface
    Publication number: 20030032379
    Abstract: An apparatus for improving performance of a wafer polishing apparatus is described. The apparatus includes a platen in a support assembly having a plurality of fluid channels and at least one region of altered topography positioned on a portion of the platen surface.
    Type: Application
    Filed: August 8, 2001
    Publication date: February 13, 2003
    Applicant: Lam Research Corportion
    Inventors: Travis R. Taylor, Cangshan Xu, Kevin T. Crofton, Eugene Yuexing Zhao