Patents by Inventor Eugeni Egorov

Eugeni Egorov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposes
    Publication number: 20050268272
    Abstract: The present invention is directed to a method and apparatus for optimizing fragmentation of integrated circuit boundaries for optical proximity correction (OPC) purposes. The present invention may balance the number of vertices and the “flexibility” of the boundary and may recover fragmentation according to the process intensity profile along the ideal edge position to obtain the best decision for OPC.
    Type: Application
    Filed: July 19, 2005
    Publication date: December 1, 2005
    Inventors: Stanislav Aleshin, Marina Medvedeva, Sergei Rodin, Eugeni Egorov
  • Gradient method of mask edge correction
    Publication number: 20050138596
    Abstract: The present invention is directed to a method and apparatus for making mask edge corrections using a gradient method for high density chip designs. The present invention uses a newly defined cost function.
    Type: Application
    Filed: December 18, 2003
    Publication date: June 23, 2005
    Inventors: Marina Medvedeva, Stanislav Aleshin, Eugeni Egorov, Sergei Rodin
  • Method and apparatus for optimizing fragmentation of boundaries for optical proximity correction (OPC) purposes
    Publication number: 20050138597
    Abstract: The present invention is directed to a method and apparatus for optimizing fragmentation of integrated circuit boundaries for optical proximity correction (OPC) purposes. The present invention may balance the number of vertices and the “flexibility” of the boundary and may recover fragmentation according to the process intensity profile along the ideal edge position to obtain the best decision for OPC.
    Type: Application
    Filed: December 18, 2003
    Publication date: June 23, 2005
    Inventors: Stanislav Aleshin, Marina Medvedeva, Sergei Rodin, Eugeni Egorov