Patents by Inventor Eugenijus Norkus

Eugenijus Norkus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220064801
    Abstract: The invention relates to selective deposition of a nickel layer on a copper surface. The invention may be used in the production of electrically conductive areas for electronic circuits. Method for nickel deposition on the surface of copper comprises immersing an item, which surface is to be deposited with the nickel layer, into one or more baths, of which at least one contains a reducing agent and of which at least one is adapted for (electroless) plating of nickel. In order to extend the field of application and to obtain practically pure nickel coatings, said reducing agent comprises boronic or phosphoric compounds, comprising morpholine borane (C4H9BNO), or dimethylamine borane (C2H7BN), or sodium tetrahydroborate (NaBH4), or sodium hypophosphite (NaH2PO2) and said reducing agent directly or indirectly reduces insoluble copper (I) or copper (II) compounds on the copper surface. At least one of the mention baths comprises a ligand or mixture thereof.
    Type: Application
    Filed: December 15, 2020
    Publication date: March 3, 2022
    Inventors: Aldona Jagminiene, Ina Stankeviciene, Karolis Ratautas, Eugenijus Norkus, Gediminas Raciukaitis
  • Patent number: 10982328
    Abstract: The present invention relates to a production of electro-conductive traces on the surface of polymeric articles using laser excitation for the areas to be metallised, followed by activation of the laser-treated areas with a metal salt solution, the article is later rinsed in distilled water, and the activated areas are metallised in the chemical plating bath. The aims of the invention are to produce cost-effective conductive traces of the circuits for the application in 3D moulded interconnect devices, to increase the quality of the circuit traces improving the selective metallization process. An irradiation dose and scanning parameters for the surface excitation are chosen experimentally, provided that a negative static charge appears on the surface of the laser-irradiated areas. The chosen parameters ensure that any surface degradation of the polymer is avoided.
    Type: Grant
    Filed: September 6, 2017
    Date of Patent: April 20, 2021
    Assignee: VALSTYBINIS MOKSLINIU TYRIMU INSTITUTAS FIZINIU IR TECHNOLOGIJOS MOKSLU CENTRAS
    Inventors: Karolis Ratautas, Gediminas Raciukaitis, Aldona Jagminiene, Ina Stankeviciene, Eugenijus Norkus
  • Publication number: 20190360104
    Abstract: The present invention relates to a production of electro-conductive traces on the surface of polymeric articles using laser excitation for the areas to be metallised, followed by activation of the laser-treated areas with a metal salt solution, the article is later rinsed in distilled water, and the activated areas are metallised in the chemical plating bath. The aims of the invention are to produce cost-effective conductive traces of the circuits for the application in 3D moulded interconnect devices, to increase the quality of the circuit traces improving the selective metallization process. An irradiation dose and scanning parameters for the surface excitation are chosen experimentally, provided that a negative static charge appears on the surface of the laser-irradiated areas. The chosen parameters ensure that any surface degradation of the polymer is avoided.
    Type: Application
    Filed: September 6, 2017
    Publication date: November 28, 2019
    Inventors: Karolis RATAUTAS, Gediminas RACIUKAITIS, Aldona JAGMINIENE, Ina STANKEVICIENE, Eugenijus NORKUS
  • Patent number: 9499913
    Abstract: A solution for electroless deposition of platinum is provided. The solution comprises Co2+ ions, Pt4+ ions, and amine ligands. A ratio of Co2+ to Pt4+ ion is between 100:1 and 2:1. The solution allows for electroless deposition of platinum without requiring high temperatures and high pH. The solution allows for the deposition of a pure platinum layer.
    Type: Grant
    Filed: April 2, 2014
    Date of Patent: November 22, 2016
    Assignee: Lam Research Corporation
    Inventors: Eugenijus Norkus, Ina Stankeviciene, Aldona Jagminiene, Loreta Tamasauskaite-Tamasiunaite, Aniruddha Joi, Yezdi Dordi
  • Patent number: 9469902
    Abstract: A method for providing an electroless plating of a platinum containing layer is provided. A Ti3+ stabilization solution is provided. A Pt4+ stabilization solution is provided. A flow from the Ti3+ stabilization solution is combined with a flow from the Pt4+ stabilization solution and water to provide a diluted mixture of the Ti3+ stabilization solution and the Pt4+ stabilization solution. A substrate is exposed to the diluted mixture of the Ti3+ stabilization solution and the Pt4+ stabilization solution.
    Type: Grant
    Filed: February 18, 2014
    Date of Patent: October 18, 2016
    Assignee: Lam Research Corporation
    Inventors: Eugenijus Norkus, Aldona Jagminiene, Albina Zieliene, Ina Stankeviciene, Loreta Tamasauskaite-Tamasiunaite, Aniruddha Joi, Yezdi Dordi
  • Patent number: 9428836
    Abstract: A solution for electroless deposition of cobalt is provided. A reducing agent of Ti3+ ions is provided to the solution. Co2+ ions are provided to the solution.
    Type: Grant
    Filed: April 29, 2014
    Date of Patent: August 30, 2016
    Assignee: Lam Research Corporation
    Inventors: Eugenijus Norkus, Ina Stankeviciene, Aldona Jagminiene, Aniruddha Joi, Loreta Tamasauskaite-Tamasiunaite, Yezdi Dordi, Zita Sukackiene
  • Publication number: 20150307994
    Abstract: A solution for electroless deposition of nickel is provided. A reducing agent of Ti3+ ion is provided to the solution. Ni2+ ions are provided to the solution.
    Type: Application
    Filed: April 29, 2014
    Publication date: October 29, 2015
    Applicant: Lam Research Corporation
    Inventors: Eugenijus NORKUS, Loreta TAMASAUSKAITE-TAMASIUNAITE, Aniruddha JOI, Aldona JAGMINIENE, Ina STANKEVICIENE, Yezdi DORDI
  • Publication number: 20150307995
    Abstract: A solution for electroless deposition of palladium is provided. A reducing agent of Co2+ or Ti3+ ions is provided to the solution. Pd2+ ions are provided to the solution.
    Type: Application
    Filed: April 29, 2014
    Publication date: October 29, 2015
    Applicant: Lam Research Corporation
    Inventors: Eugenijus NORKUS, Aldona JAGMINIENE, Ina STANKEVICIENE, Aniruddha JOI, Yezdi DORDI
  • Publication number: 20150307993
    Abstract: A solution for electroless deposition of cobalt is provided. A reducing agent of Ti3+ ions is provided to the solution. Co2+ ions are provided to the solution.
    Type: Application
    Filed: April 29, 2014
    Publication date: October 29, 2015
    Applicant: Lam Research Corporation
    Inventors: Eugenijus NORKUS, Ina STANKEVICIENE, Aldona JAGMINIENE, Aniruddha JOI, Loreta TAMASAUSKAITE-TAMASIUNAITE, Yezdi DORDI, Zita SUKACKIENE
  • Publication number: 20150284857
    Abstract: A solution for electroless deposition of platinum is provided. The solution comprises Co2+ ions, Pt4+ ions, and amine ligands. A ratio of Co2+ to Pt4+ ion is between 100:1 and 2:1. The solution allows for electroless deposition of platinum without requiring high temperatures and high pH. The solution allows for the deposition of a pure platinum layer.
    Type: Application
    Filed: April 2, 2014
    Publication date: October 8, 2015
    Applicant: Lam Research Corporation
    Inventors: Eugenijus NORKUS, Ina STANKEVICIENE, Aldona JAGMINIENE, Loreta TAMASAUSKAITE-TAMASIUNAITE, Aniruddha JOI, Yezdi DORDI
  • Publication number: 20150232995
    Abstract: A method for providing an electroless plating of a platinum containing layer is provided. A Ti3+ stabilization solution is provided. A Pt4+ stabilization solution is provided. A flow from the Ti3+ stabilization solution is combined with a flow from the Pt4+ stabilization solution and water to provide a diluted mixture of the Ti3+ stabilization solution and the Pt4+ stabilization solution. A substrate is exposed to the diluted mixture of the Ti3+ stabilization solution and the Pt4+ stabilization solution.
    Type: Application
    Filed: February 18, 2014
    Publication date: August 20, 2015
    Applicant: Lam Research Corporation
    Inventors: Eugenijus NORKUS, Aldona JAGMINIENE, Albina ZIELIENE, Ina STANKEVICIENE, Loreta TAMASAUSKAITE-TAMASIUNAITE, Aniruddha JOI, Yezdi DORDI
  • Patent number: 8298325
    Abstract: A non-aqueous electroless copper plating solution that includes an anhydrous copper salt component, an anhydrous cobalt salt component, a non-aqueous complexing agent, and a non-aqueous solvent is provided.
    Type: Grant
    Filed: February 8, 2010
    Date of Patent: October 30, 2012
    Assignee: Lam Research Corporation
    Inventors: Eugenijus Norkus, Jane Jaciauskiene, Yezdi Dordi
  • Publication number: 20120152147
    Abstract: A non-aqueous electroless copper plating solution that includes an anhydrous copper salt component, an anhydrous cobalt salt component, a non-aqueous complexing agent, and a non-aqueous solvent is provided.
    Type: Application
    Filed: February 8, 2010
    Publication date: June 21, 2012
    Inventors: Eugenijus Norkus, Jane Jaciauskiene, Yezdi Dordi
  • Patent number: 7988774
    Abstract: Systems and methods for electroless deposition of a cobalt-alloy layer on a copper surface include a solution characterized by a low pH. This solution may include, for example, a cobalt(II) salt, a complexing agent including at least two amine groups, a pH adjuster configured to adjust the pH to below 7.0, and a reducing agent. In some embodiments, the cobalt-alloy is configured to facilitate bonding and copper diffusion characteristics between the copper surface and a dielectric in an integrated circuit.
    Type: Grant
    Filed: August 10, 2010
    Date of Patent: August 2, 2011
    Assignee: Lam Research Corporation
    Inventors: Algirdas Vaskelis, Aldona Jagminiene, Ina Stankeviciene, Eugenijus Norkus
  • Publication number: 20100304562
    Abstract: Systems and methods for electroless deposition of a cobalt-alloy layer on a copper surface include a solution characterized by a low pH. This solution may include, for example, a cobalt(II) salt, a complexing agent including at least two amine groups, a pH adjuster configured to adjust the pH to below 7.0, and a reducing agent. In some embodiments, the cobalt-alloy is configured to facilitate bonding and copper diffusion characteristics between the copper surface and a dielectric in an integrated circuit.
    Type: Application
    Filed: August 10, 2010
    Publication date: December 2, 2010
    Applicant: Lam Research Corporation
    Inventors: Algirdas Vaskelis, Aldona Jagminiene, Ina Stankeviciene, Eugenijus Norkus
  • Patent number: 7794530
    Abstract: Systems and methods for electroless deposition of a cobalt-alloy layer on a copper surface include a solution characterized by a low pH. This solution may include, for example, a cobalt(II) salt, a complexing agent including at least two amine groups, a pH adjuster configured to adjust the pH to below 7.0, and a reducing agent. In some embodiments, the cobalt-alloy is configured to facilitate bonding and copper diffusion characteristics between the copper surface and a dielectric in an integrated circuit.
    Type: Grant
    Filed: December 22, 2006
    Date of Patent: September 14, 2010
    Assignee: Lam Research Corporation
    Inventors: Algirdas Vaskelis, Aldona Jagminiene, Ina Stankeviciene, Eugenijus Norkus
  • Patent number: 7686875
    Abstract: A non-aqueous electroless copper plating solution that includes an anhydrous copper salt component, an anhydrous cobalt salt component, a non-aqueous complexing agent, and a non-aqueous solvent is provided.
    Type: Grant
    Filed: December 18, 2008
    Date of Patent: March 30, 2010
    Assignee: Lam Research Corporation
    Inventors: Eugenijus Norkus, Jane Jaciauskiene, Yezdi Dordi
  • Patent number: 7682431
    Abstract: An electroless ruthenium plating solution is disclosed herein. The solution includes a ruthenium source, a polyamino polycarboxylic acid complexing agent, a reducing agent, a stabilizing agent, and a pH-modifying substance. A method of preparing an electroless ruthenium plating solution is also provided.
    Type: Grant
    Filed: November 12, 2008
    Date of Patent: March 23, 2010
    Assignee: Lam Research Corporation
    Inventors: Albina Zieliene, Algirdas Vaskelis, Eugenijus Norkus
  • Publication number: 20090095198
    Abstract: A non-aqueous electroless copper plating solution that includes an anhydrous copper salt component, an anhydrous cobalt salt component, a non-aqueous complexing agent, and a non-aqueous solvent is provided.
    Type: Application
    Filed: December 18, 2008
    Publication date: April 16, 2009
    Inventors: Eugenijus Norkus, Jane Jaciauskiene, Yezdi Dordi
  • Publication number: 20080152822
    Abstract: Systems and methods for electroless deposition of a cobalt-alloy layer on a copper surface include a solution characterized by a low pH. This solution may include, for example, a cobalt(II) salt, a complexing agent including at least two amine groups, a pH adjuster configured to adjust the pH to below 7.0, and a reducing agent. In some embodiments, the cobalt-alloy is configured to facilitate bonding and copper diffusion characteristics between the copper surface and a dielectric in an integrated circuit.
    Type: Application
    Filed: December 22, 2006
    Publication date: June 26, 2008
    Inventors: Algirdas Vaskelis, Aldona Jagminiene, Ina Stankeviciene, Eugenijus Norkus