Patents by Inventor Euihoon JUNG

Euihoon JUNG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SLURRY COMPOSITION FOR CHEMICAL MECHANICAL POLISHING PROCESS AND METHOD OF FORMING PHASE CHANGE MEMORY DEVICE USING THE SAME
    Publication number: 20120049107
    Abstract: A slurry composition for chemical mechanical polishing of a polishing target layer containing a phase change material and a method of forming a phase change memory device using the same, the slurry composition including abrasive particles; and a nonionic surfactant, wherein a concentration of the nonionic surfactant in the slurry composition is about 100 ppb to about 300 ppb.
    Type: Application
    Filed: August 18, 2011
    Publication date: March 1, 2012
    Inventors: Joonsang PARK, Euihoon JUNG, Boun YOON, Jaedong LEE