Abstract: An imprint pressure roller device is provided. The imprint pressure roller device includes a roller member that applies pressure downward while rotating about a shaft, a bearing block that is coupled to both ends of the roller member to allow rotation of the roller member and a frame that is coupled to the bearing block to support the roller member and the bearing block, wherein the bearing block includes a coupling portion that is connected to the shaft, a core portion that extends from the coupling portion in a vertical direction, a first coil that completely surrounds sides of the core portion and a second coil that completely surrounds the sides of the core portion and is disposed on the first coil to be spaced apart from the first coil.

Abstract: An exposure apparatus may include: a stage configured to move a substrate; an optical unit configured to generate and project a plurality of laser beams; and a control unit configured to measure straightness of the stage by controlling the projection of the laser beams to an exposed surface of the substrate while moving the stage. A method to measure straightness of a stage in an exposure apparatus may include: placing a substrate on the stage; moving the stage and substrate; generating a plurality of laser beams; projecting the laser beams to the substrate on the stage; and measuring the straightness of the stage by projecting the laser beams to an exposed surface of the substrate.