Patents by Inventor Eun-Sam Jung

Eun-Sam Jung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate detecting apparatus
    Patent number: 7219676
    Abstract: A substrate cleaning apparatus includes a bath in the form of a vessel filled with a cleaning liquid, a substrate guide disposed on the bottom of the vessel and configured to support at least one substrate vertically, a first sensing unit for sensing the substrate(s) supported by the guide, and a second sensing unit for sensing substrates or remnants thereof disposed on the bottom of the vessel. The first sensing unit has sensor elements installed on the opposite sides of the vessel as situated across from one another. The second sensing unit has sensor elements installed on both sides and on the bottom of the vessel for detecting substrates or remnants from damaged substrates lying on the bottom of the process chamber.
    Type: Grant
    Filed: August 1, 2003
    Date of Patent: May 22, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Moon-Taek Lim, Eun-Sam Jung, Ki-Ryong Choi
  • Substrate detecting apparatus
    Publication number: 20040040587
    Abstract: A substrate cleaning apparatus includes a bath in the form of a vessel filled with a cleaning liquid, a substrate guide disposed on the bottom of the vessel and configured to support at least one substrate vertically, a first sensing unit for sensing the substrate(s) supported by the guide, and a second sensing unit for sensing substrates or remnants thereof disposed on the bottom of the vessel. The first sensing unit has sensor elements installed on the opposite sides of the vessel as situated across from one another. The second sensing unit has sensor elements installed on both sides and on the bottom of the vessel for detecting substrates or remnants from damaged substrates lying on the bottom of the process chamber.
    Type: Application
    Filed: August 1, 2003
    Publication date: March 4, 2004
    Inventors: Moon-Taek Lim, Eun-Sam Jung, Ki-Ryong Choi