Abstract: Provided are a fireproof door apparatus, a fireproof structure, and a substrate treating facility. The fireproof door apparatus includes a fireproof shutter opening and closing a passage connecting two spaces, a release unit installed on one side of the passage and in the fireproof shutter and fixing the fireproof shutter in an open state using magnetic force or releasing the fireproof shutter that is fixed, and a gas spring connected to the fireproof shutter and moving the fireproof shutter toward the passage by heat of the fire to close the passage.

Abstract: Provided is a crane device with a plurality of crane robots within a limited space to improve the transport efficiency of a container. The crane device comprises: a first crane robot; and a second crane robot, wherein the first crane robot comprises: a first column configured to be movable in a first direction and extend in a second direction; a first arm unit configured to be movable along the first column; and a first drive unit installed in an upper part of the first column and configured to move the first column in the first direction, and the second crane robot comprises: a second column configured to be movable in the first direction and extend in the second direction and spaced apart from the first column; a second arm unit configured to be movable along the second column; and a second drive unit installed in a lower part of the second column and configured to move the second column in the first direction.

Abstract: Provided is an apparatus for transporting articles that can effectively treat numerous articles. The apparatus for transporting articles comprises: a frame; a first transport mounting portion connected to the frame and configured to support a first-class article from below; a second transport mounting portion connected to the frame, disposed over the first transport mounting portion and configured to support the first-class article from below; a third transport mounting portion connected to the frame, disposed over the second transport mounting portion and configured to support a second-class article different from the first-class article from below. The first transport mounting portion operates independently of the second and third transport mounting portions, and the second transport mounting portion and the third transport mounting portion operate simultaneously.

Abstract: An inter-floor transport apparatus and a logistics transport system including the inter-floor transport apparatus are provided. The logistics transport system includes: a stage module installed in space where semiconductor devices are fabricated, the stage module including a plurality of stages, which are installed on different floors; a frame module installed to have a direction intersecting the plurality of stages as a length direction; and an inter-floor transport apparatus moving along the frame module and transporting conveyed articles to each of the stages, wherein the inter-floor transport apparatus includes a first load unit, which transports the conveyed articles, a second load unit, which is disposed below the first load unit and transports the conveyed articles, a driving unit, which moves the first and second load units, and a control unit, which controls an operation of the driving unit, and transports a plurality of conveyed articles at the same time.

Abstract: A tower lift includes a main frame extending in a vertical direction, a carriage module configured to be movable in the vertical direction along the main frame, a weight module disposed behind the carriage module and configured to be movable in the vertical direction along the main frame, a driving module disposed on the main frame and configured to move the carriage module and the weight module in the vertical direction using at least one timing belt, an auto tensioner disposed on a lower portion of the main frame and connected with the carriage module and the weight module by a balance belt, and an upper alignment unit for aligning a horizontal position of the at least one timing belt.

Abstract: A carriage robot includes a robot arm being configured to transport a plurality of containers, a robot hand connected to an end of the robot arm, the robot hand being configured to support a first container having a first size among the containers, and a gripper provided under the robot hand, the gripper being configured to grip a second container having a second size different from the first size. Thus, the carriage robot is capable of transport the containers, each having a size different from each other.

Abstract: A tower lift includes a main frame extending in a vertical direction, a carriage module configured to be movable in the vertical direction along the main frame, a weight module disposed behind the carriage module and configured to be movable in the vertical direction along the main frame, a driving module disposed on the main frame and configured to move the carriage module and the weight module in the vertical direction using at least one timing belt, an auto tensioner disposed on a lower portion of the main frame and connected with the carriage module and the weight module by a balance belt, and an upper alignment unit for aligning a horizontal position of the at least one timing belt.