Abstract: The present invention relates to a Thermal Desorption analysis automation system including an automation system and an analysis method using the same to quickly perform a wafer defect analysis process. The Thermal Desorption analysis automation system includes a heating device that includes a heater for heating a wafer, an analysis device that receives gas containing contaminants desorbed from the heated wafer and analyzes the gas, a coupling part that is disposed outside a chamber and coupled to the wafer, a wafer transfer device that is provided with an arm transferring the coupling part, and a control unit that controls the wafer transfer device to insert the wafer into the chamber and transfer the wafer in the chamber to the outside.

Abstract: Provided is a liquid chromatography apparatus for fast measuring, and more particularly, a liquid chromatography apparatus which includes a first column and a second column having different component separations for an interest component within a sample and makes components primarily separated in the first column be secondarily separated in the second column of a first channel unit before a switching valve is switched, makes the components primarily separated in the first column be continuously discharged through a second channel unit after the switching valve is switched, thereby improving the component separation and achieving the fast measuring.

Abstract: Provided are an apparatus and a method for detecting a pollution location by including a plurality of sampling ports provided so that air is sucked from several points in a space to be measured and measuring pollution levels of air sucked from the respective sampling ports or some sampling ports that are grouped in the case in which an average pollution level of the air sucked from the plurality of sampling ports is out of a predetermined range. In the apparatus and a method for detecting a pollution location, a pollution level in a wide space may be effectively monitored.

Abstract: Provided are a multi sampling port monitoring apparatus for measuring a pollution level in a predetermined space and a monitoring method using the same. More particularly, provided are a multi sampling port monitoring apparatus capable of effectively monitoring a pollution level in a wide space by including a plurality of sampling ports so that air is sucked at several points in a space to be measured, measuring an average pollution level of the air sucked from the plurality of sampling ports, and allowing pollution levels of the air sucked from the sampling ports to be individually measured in the case in which the average pollution level is out of a predetermined range, and a monitoring method using the same.

Abstract: Provided are a multi sampling port monitoring apparatus for measuring a pollution level in a predetermined space and a monitoring method using the same. More particularly, provided are a multi sampling port monitoring apparatus capable of effectively monitoring a pollution level in a wide space by including a plurality of sampling ports so that air is sucked at several points in a space to be measured, measuring an average pollution level of the air sucked from the plurality of sampling ports, and allowing pollution levels of the air sucked from the sampling ports to be individually measured in the case in which the average pollution level is out of a predetermined range, and a monitoring method using the same.

Abstract: Provided is a liquid chromatography apparatus for fast measuring, and more particularly, a liquid chromatography apparatus which includes a first column and a second column having different component separations for an interest component within a sample and makes components primarily separated in the first column be secondarily separated in the second column of a first channel unit before a switching valve is switched, makes the components primarily separated in the first column be continuously discharged through a second channel unit after the switching valve is switched, thereby improving the component separation and achieving the fast measuring.