Patents by Inventor Eunsun Noh

Eunsun Noh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES USING CAVITIES TO DISTRIBUTE CONDUCTIVE PATTERNING RESIDUE
    Publication number: 20150194599
    Abstract: Methods of manufacturing a semiconductor device include forming a conductive layer on a substrate, forming an air gap or other cavity between the conductive layer and the substrate, and patterning the conductive layer to expose the air gap. The methods may further include forming conductive pillars between the substrate and the conductive layer. The air gap may be positioned between the conductive pillars.
    Type: Application
    Filed: October 24, 2014
    Publication date: July 9, 2015
    Inventors: Jongchul Park, Byoungjae Bae, Inho Kim, Shin Kwon, Eunsun Noh, Insun Park, Sangmin Lee