Patents by Inventor Everhardus Cornedis Mos

Everhardus Cornedis Mos has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic Method
    Publication number: 20090128832
    Abstract: A method includes determining relative positional relationships between applied fields on a substrate, one of the applied fields including a first field; in a lithographic apparatus, using an alignment apparatus to obtain at least one absolute positional relationship between the position of at least the first field of the substrate and a part of the lithographic apparatus; and determining an absolute positional relationship between at least one field, other than the first field, and a part of the lithographic apparatus using the relative positional relationships and the at least one obtained absolute relationship.
    Type: Application
    Filed: October 27, 2008
    Publication date: May 21, 2009
    Applicant: ASML Netherlands B.V.
    Inventors: Franciscus Bernardus Maria VAN BILSEN, Everhardus Cornedis Mos