Patents by Inventor Everhardus Corneilis MOS

Everhardus Corneilis MOS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS TO CORRECT FOR PATTERNING PROCESS ERROR
    Publication number: 20180322237
    Abstract: A method including modeling high resolution patterning error information of a patterning process involving a patterning device in a patterning system using an error mathematical model, modeling a correction of the patterning error that can be made by a patterning device modification tool using a correction mathematical model, the correction mathematical model having substantially the same resolution as the error mathematical model, and determining modification information for modifying the patterning device using the patterning device modification tool by applying the correction mathematical model to the patterning error information modeled by the error mathematical model.
    Type: Application
    Filed: September 26, 2016
    Publication date: November 8, 2018
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Peter TEN BERGE, Everhardus Corneilis MOS, Richard Johannes Franciscus VAN HAREN, Peter Hanzen WARDENIER, Erik JENSEN