Abstract: A lithographic apparatus includes a control system configured to control a position of a substrate table, the control system including: a first detection device to generate a projection system position signal representative of the position of the projection system, a second detection device to generate a projection system feed-forward signal, a comparative unit to generate a servo error signal by subtracting a signal representative of an actual substrate table position from a substrate table position reference signal and adding the projection system position signal, a control unit to generate a first control signal on the basis of the servo error signal, an addition unit to generate a second control signal by adding the feed-forward signal and the first control signal, and an actuator unit to actuate said substrate table to a desired substrate table position on the basis of the second control signal, The control system further includes a projection system position signal filter unit to filter the projection s