Abstract: In some implementations, a method is provided in a plasma processing chamber for stabilizing etch-rate distributions during a process transition from one process step to another process step. The method includes performing a pre-transition compensation of at least one other process parameter so as to avoid unstable plasma states by inhibiting formation of a parasitic plasma during the process transition. In some implementations, a method is provided for processing a workpiece in plasma processing chamber, which includes inhibiting deviations from an expected etch-rate distribution by avoiding unstable plasma states during a process transition from one process step to another process step.

Abstract: A method, a system and a computer readable medium for integrated in-vacuo repair of low-k dielectric thin films damaged by etch and/or strip processing. A repair chamber is integrated onto a same platform as a plasma etch and/or strip chamber to repair a low-k dielectric thin film without breaking vacuum between the damage event and the repair event. UV radiation may be provided on the integrated etch/repair platform in any combination of before, after, or during the low-k repair treatment to increase efficacy of the repair treatment and/or stability of repair.

Abstract: A noise reduction system for use with noise generating equipment. The system includes at least one sensor to generate one or more input signals, with each input signal being representative of an operating condition of the equipment. The system also includes a signal processing unit in communication each sensor to receive the input signal(s) and to generate at least one anti-noise output signal based on the input signal(s). The system further includes at least one output device in communication with the signal processing unit to generate anti-noise based on an anti-noise output signal. The anti-noise reduces noise emitted by the equipment during operation.

Abstract: A gear shifting system for a human-powered chain- or belt-driven vehicle includes a wheel speed sensor, a cadence sensor, a gear changer position sensor, a tension sensor, a clinometer, a controller and a gear changer actuator. The wheel speed sensor senses a speed of a wheel, while the cadence sensor senses a drive rate that a torque drive member drives a torque-transmitting member. The gear changer position sensor senses a position of a gear changer that positions the torque-transmitting member with respect to a plurality of gears. The tension sensor senses a tension of the torque-transmitting member that is transmitting a torque applied to the torque-transmitting drive member to a gear. The clinometer senses an inclination of the vehicle. The controller generates a control signal based on the sensed wheel speed, the sensed torque-member drive rate, the sensed torque-transmitting member tension, the sensed vehicle inclination and the sensed gear changer position.