Patents by Inventor F. Read McFeely

F. Read McFeely has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Delivery systems for gases for gases via the sublimation of solid precursors
    Patent number: 6984415
    Abstract: A method of depositing a metal or other desired material onto a substrate using a gas generated via the sublimation of solid material precursors, wherein a sold precursor is introduced into a liquid in a bubbler apparatus so that the bubbler then contains vapors of solid precursor, and then sweeping a carrier gas through the bubbler to a reactor containing a substrate which is coated with the precursor via chemical vapor deposition.
    Type: Grant
    Filed: August 20, 1999
    Date of Patent: January 10, 2006
    Assignee: International Business Machines Corporation
    Inventors: F. Read McFeely, Deborah A. Neumayer, John J. Yurkas
  • Method for improving the morphology of refractory metal thin films
    Patent number: 6107199
    Abstract: A method of producing a smooth surface for a film of refractory metallic material is realized by placing a substrate in a CVD reactor; initiating deposition of a layer of two phase material via concurrent introduction into the CVD reactor of a precursor gas and molecular oxygen, the latter at a pressure between about 1.times.10.sup.-6 and 1.times.10.sup.-4 ; and annealing the treated layer at the deposition temperature.
    Type: Grant
    Filed: October 24, 1998
    Date of Patent: August 22, 2000
    Assignee: International Business Machines Corporation
    Inventors: Russell D. Allen, F. Read McFeely, Cevdet I. Noyan, John J. Yurkas