Patents by Inventor Fabian Haacker

Fabian Haacker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for illuminating an object field of a projection exposure system
    Patent number: 10409167
    Abstract: A method for illuminating an object field of a projection exposure apparatus includes providing a subset of first facets to be positioned in park positions, which are each spaced apart from an associated target position, but at most by a maximum distance.
    Type: Grant
    Filed: August 2, 2016
    Date of Patent: September 10, 2019
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Martin Endres, Johannes Eisenmenger, Stig Bieling, Markus Hauf, Lars Wischmeier, Fabian Haacker
  • Mirror device
    Patent number: 10101507
    Abstract: A mirror device includes at least one electrically conductive shielding element, which forms a mechanism for producing an electric field in a region adjacent to at least one side surface and/or a rear side of a mirror body.
    Type: Grant
    Filed: June 13, 2017
    Date of Patent: October 16, 2018
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Yanko Sarov, Markus Holz, Fabian Haacker, Mark Christof Wengler, Markus Hauf
  • Mirror array
    Patent number: 9874819
    Abstract: A mirror array includes a multiplicity of displaceable individual mirrors which are subdivided into at least two groups. The individual mirrors of the first group are displaceable in a very precise manner, and the individual mirrors of the second group are displaceable in a very quick manner.
    Type: Grant
    Filed: August 2, 2016
    Date of Patent: January 23, 2018
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Stig Bieling, Markus Hauf, Lars Wischmeier, Fabian Haacker, Martin Endres, Johannes Eisenmenger
  • Optical component
    Patent number: 9851555
    Abstract: An optical component includes at least one micro-opto-electro-mechanical system (MOEMS) with a front side and a rear side. The optical component also includes at least one printed circuit board arranged on the rear side of the at least one MOEMS. The at least one printed circuit board has lateral contacts. The at least one printed circuit board may be equipped with electronic parts and cooling elements. The at least one MOEMS projects laterally beyond the at least one printed circuit board.
    Type: Grant
    Filed: February 23, 2016
    Date of Patent: December 26, 2017
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Markus Holz, Benjamin Sigel, Jan Horn, Benedikt Knauf, Fabian Haacker
  • MIRROR DEVICE
    Publication number: 20170276842
    Abstract: A mirror device includes at least one electrically conductive shielding element, which forms a mechanism for producing an electric field in a region adjacent to at least one side surface and/or a rear side of a mirror body.
    Type: Application
    Filed: June 13, 2017
    Publication date: September 28, 2017
    Inventors: Yanko Sarov, Markus Holz, Fabian Haacker, Christof Wengler, Markus Hauf
  • METHOD FOR ILLUMINATING AN OBJECT FIELD OF A PROJECTION EXPOSURE SYSTEM
    Publication number: 20160342094
    Abstract: A method for illuminating an object field of a projection exposure apparatus includes providing a subset of first facets to be positioned in park positions, which are each spaced apart from an associated target position, but at most by a maximum distance.
    Type: Application
    Filed: August 2, 2016
    Publication date: November 24, 2016
    Inventors: Martin Endres, Johannes Eisenmenger, Stig Bieling, Markus Hauf, Lars Wischmeier, Fabian Haacker
  • MIRROR ARRAY
    Publication number: 20160342095
    Abstract: A mirror array includes a multiplicity of displaceable individual mirrors which are subdivided into at least two groups. The individual mirrors of the first group are displaceable in a very precise manner, and the individual mirrors of the second group are displaceable in a very quick manner.
    Type: Application
    Filed: August 2, 2016
    Publication date: November 24, 2016
    Inventors: Stig Bieling, Markus Hauf, Lars Wischmeier, Fabian Haacker, Martin Endres, Johannes Eisenmenger