Abstract: A method prepares a microsample from a volume sample using multiple particle beams. The method includes providing a volume sample in the microscope system, wherein the interior of the volume sample has a sample region of interest, and producing a macrolamella comprising the sample region of interest by removing sample material of the volume sample using one of the particle beams. The method also includes orienting the macrolamella relative to one of the particle beams, and removing sample material of the macrolamella via a beam so that the region of interest is exposed.

Abstract: Processing an object using a material processing device with a particle beam apparatus includes determining a region of interest of the object on or in a first material region of the object, ablating material from a second material region adjoining the first material region using an ablation device, and recognizing a geometric shape of the first material region. The geometric shape has a center. Processing the object also includes ablating material from a second portion of the first material region adjoining a first portion using a particle beam, the first portion having a first subregion and a second subregion, the region of interest being arranged in the first subregion, recognizing a further geometric shape of the first material region, positioning the object such that the first position corresponds to a center of the further geometric shape, and ablating material from the second subregion using the particle beam.

Abstract: The invention relates to a method for processing an object using a material processing device that has a particle beam apparatus.

Abstract: A method prepares a microsample from a volume sample using multiple particle beams. The method includes providing a volume sample in the microscope system, wherein the interior of the volume sample has a sample region of interest, and producing a macrolamella comprising the sample region of interest by removing sample material of the volume sample using one of the particle beams. The method also includes orienting the macrolamella relative to one of the particle beams, and removing sample material of the macrolamella via a beam so that the region of interest is exposed.

Abstract: Generating image data of an object using a particle beam includes arranging at least one mark in the object or in a support material in which the object is embedded, determining a first examination region, exposing the first examination region by removing material of at least one of: the object and the support material, guiding a first particle beam over the first examination region, and acquiring image data of the first examination region using at least one detector by detecting interaction particles and/or interaction radiation due to an interaction of the first particle beam with the first examination region. Generating image data of an object using a particle beam may also include introducing the object into a support material in such a way that the object is partly or completely surrounded by the support material. A second examination region of the object may be determined relative to the mark.

Abstract: The invention relates to a method for generating image data relating to an object (100) and to a particle beam device for carrying out this method. In the method, a marking (103, 104) is arranged in the object or in the support material for the object, at least one examination region (105) of the object is determined, the examination region is exposed by removing material of the object and/or of the support material, a first particle beam is guided over the exposed examination region, and image data relating to the exposed examination region (106) are acquired using a detector (22, 23) by detecting interaction particles and/or interaction radiation on account of interaction between the first particle beam and the exposed examination region. In this case, the examination region can be determined by means of a tomographic method, by means of x-ray microscopy or by means of laser scanning microscopy.

Abstract: The invention relates to a method for the production of a multilayer electrostatic lens arrangement with at least one lens electrode in general, a method for the production of a phase plate in particular as well as the lens arrangement, the phase plate and a transmission electron microscope with the phase plate. The lens arrangement or the phase plate is produced from a thin self-supporting silicon nitride membrane which is fixed in a macroscopic chip with deposition of further layers. The central bore as well as the aperture opening are milled out by means of an ion beam.

Abstract: A processing system includes a piping which extends annularly, such as in the form of a circular annular shape, around a beam path between a focusing lens and an interaction region. The piping includes, on a side which faces the interaction region, a plurality of exit openings for the gas towards the interaction region. The piping also includes a holder configured to pivot the piping about a pivot axis. The holder is parallel to the tilt axis of the object holder.

Abstract: A processing system includes a piping which extends annularly, such as in the form of a circular annular shape, around a beam path between a focusing lens and an interaction region. The piping includes, on a side which faces the interaction region, a plurality of exit openings for the gas towards the interaction region. The piping also includes a holder configured to pivot the piping about a pivot axis. The holder is parallel to the tilt axis of the object holder.