Abstract: A micromechanical resonator wafer assembly includes an actuator wafer supporting an outer actuator layer. The outer actuator layer includes an oscillating part configured to be driven by an electrical drive signal. The micromechanical resonator wafer assembly further includes a device wafer mounted on top of the actuator wafer. The device wafer includes a plurality of inner actuators. Each of the inner actuators include an oscillation body configured to oscillate about one or more axes. The device wafer is physically connected to the actuator wafer such that each of the inner actuators forms with the outer actuator layer a coupled oscillation system for excitation of the oscillation body of the respective inner actuator. The micromechanical resonator wafer assembly provides external actuation of the oscillation body of each of the inner actuators by use of the outer actuator layer and hence, provides improved scan angles with fast start-up time.

Abstract: A deflection device for Lissajous scanning is provided. The deflection device includes a frame and a mirror. The mirror is movably arranged in a recess in the frame by means of a suspension mount including one or more springs. The mirror may be configured to swing back and forth about each of two or three axes with a respective eigenfrequency for reflecting incoming light at different angles to form a two-dimensional Lissajous pattern. The deflection device may include a driving device configured to excite swing motion of the mirror about each of the two or three axes at or near the respective eigenfrequency. Each of the one or more springs has a shape of a path segment along a circumference of the mirror together covering more than 360 degrees. An arrangement of the one or more springs provides a compact suspension for the mirror and larger tilt angles.

Abstract: The invention relates to a glass substrate-based MEMS mirror device for variable deflection of an incident electromagnetic beam, as well as a method for its production. The MEMS mirror device has a disk-shaped first glass substrate structured into a plurality of subregions with a mirror subregion formed at least partially as a MEMS mirror for reflecting electromagnetic radiation and a frame subregion surrounding the mirror subregion at least in sections. The mirror subregion is designed as a subregion of the first glass substrate suspended so as to be capable of oscillating in several dimensions relative to the frame subregion by means of at least one connecting element connecting the mirror subregion and the frame subregion and which can be designed in particular as a connecting web or mechanical spring.

Abstract: The present invention relates to a thermoplastic hose, consisting of a flexible hose body (12; 212; 312; 612) and at least one reinforcing element (14; 214; 314; 614), which is arranged helically on the external face of the hose body (12; 212; 312; 612), wherein the at least one reinforcing element (14; 214; 314; 614) is made of an extruded material and is rigidly joined to the external face of the hose body (12; 212; 312; 612) by means of a fusion bond, wherein the hose body (12; 212; 312; 612) is an extruded hose body (12; 212; 312; 612). The invention also relates to a device and a method for producing such a hose.