Abstract: An MEMS sound transducer having: a deflectable bending transducer element which is clamped on at least one side relative to a surrounding structure, the bending transducer element having a free end on at least one side, which is separated from the surrounding structure by a gap, the deflectable bending transducer element being configured to be subjected to bending along a bending line and/or torsion along a torsion axis as a result of a force in order to be deflected as a result of the bending, the deflectable bending transducer element having at least one screen structure which projects vertically from one of the main directions of extension of the bending transducer element and is implemented to be flexible at least along the bending line and/or along the torsion axis.

Abstract: An MEMS sound transducer is provided, having: at least one actuator; a radiation structure coupled to the actuator and configured as a separate element; a structure surrounding the radiation structure, wherein the radiation structure is separated from the surrounding structure by one or more gaps; and at least one screen arranged along at least one of the one or more gaps.

Abstract: Embodiments of the present disclosure describe MEMS sound transducers for generating sound, having an actuator, wherein the actuator is separated from a surrounding structure by one or more gaps and is configured to execute a relative movement between the actuator and the surrounding structure. Additionally, the MEMS sound transducer has the surrounding structure, wherein the actuator and the surrounding structure has a plurality of recesses and projections which are separated by one or more gaps, wherein the plurality of projections belonging to the actuator are arranged to interdigitate into the plurality of recesses belonging to the surrounding structure, and/or the plurality of projections belonging to the surrounding structure to interdigitate into the plurality of recesses belonging to the actuator.

Abstract: Embodiments of the present disclosure describe an MEMS sound transducer having an actuator and a structure surrounding the actuator, wherein the actuator is separated from the surrounding structure by one or several slits. Furthermore, the sound transducer includes at least one first diaphragm arranged on the actuator along at least one of the one or several slits; and at least one second diaphragm arranged on the surrounding structure along the slit of the one or several slits.

Abstract: A MEMS sound transducer includes a substrate, a membrane formed within the substrate, and a bending actuator applied onto the membrane. The membrane includes at least one integrated permanent magnet and is electrodynamically controllable. The bending actuator can be piezoelectrically controlled separately from the membrane.

Abstract: A micromechanical sound transducer according to a first aspect includes a first bending transducer with a free end and a second bending transducer with a free end, the two bending transducers being arranged in a mutual plane, wherein the free end of the first bending transducer is separated from the free end of the second bending transducer via a slit. The second bending transducer is excited in-phase with the vertical vibration of the first bending transducer. A micromechanical sound transducer according to a second aspect includes a first bending transducer that is excited to vibrate vertically and a diaphragm element extending vertically to the first bending transducer, the diaphragm element being separated from a free end of the first bending transducer via a slit.

Abstract: A MEMS sound transducer includes a substrate, a membrane formed within the substrate, and a bending actuator applied onto the membrane. The membrane includes at least one integrated permanent magnet and is electrodynamically controllable. The bending actuator can be piezoelectrically controlled separately from the membrane.

Abstract: A micromechanical sound transducer according to a first aspect includes a first bending transducer with a free end and a second bending transducer with a free end, the two bending transducers being arranged in a mutual plane, wherein the free end of the first bending transducer is separated from the free end of the second bending transducer via a slit. The second bending transducer is excited in-phase with the vertical vibration of the first bending transducer. A micromechanical sound transducer according to a second aspect includes a first bending transducer that is excited to vibrate vertically and a diaphragm element extending vertically to the first bending transducer, the diaphragm element being separated from a free end of the first bending transducer via a slit.

Abstract: A micro-electro-mechanical system includes a deflectable actuator plate and an abutment area. An integral piezoelectric functional layer of the deflectable actuator plate is configured across an area APS of the actuator plate. The deflectable actuator plate is configured to effect a hollow warp in at least a controlled or non-controlled state, wherein the abutment area is disposed facing a hollow side of the deflectable actuator plate defined by the hollow warp. The deflectable actuator plate is configured to provide, in the state in which the same effects the hollow warp, mechanical contact between the deflectable actuator plate and the abutment area. In the other state, the deflectable actuator plate is disposed spaced apart from the abutment area.

Abstract: A MEMS includes a diaphragm, a stroke structure coupled to the diaphragm, and at least two piezoelectric actuators coupled to a plurality of mutually spaced-apart contact points of the stroke structure via a plurality of mutually spaced-apart connecting elements, the at least two piezoelectric actuators being configured to cause a stroke movement of the stroke structure so as to deflect the diaphragm.

Abstract: A MEMS includes a diaphragm, a stroke structure coupled to the diaphragm, and at least two piezoelectric actuators coupled to a plurality of mutually spaced-apart contact points of the stroke structure via a plurality of mutually spaced-apart connecting elements, the at least two piezoelectric actuators being configured to cause a stroke movement of the stroke structure so as to deflect the diaphragm.

Abstract: A micro-electro-mechanical system includes a deflectable actuator plate and an abutment area. An integral piezoelectric functional layer of the deflectable actuator plate is configured across an area APS of the actuator plate. The deflectable actuator plate is configured to effect a hollow warp in at least a controlled or non-controlled state, wherein the abutment area is disposed facing a hollow side of the deflectable actuator plate defined by the hollow warp. The deflectable actuator plate is configured to provide, in the state in which the same effects the hollow warp, mechanical contact between the deflectable actuator plate and the abutment area. In the other state, the deflectable actuator plate is disposed spaced apart from the abutment area.