Patents by Inventor Fabian WALTHER

Fabian WALTHER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
    Publication number: 20240067520
    Abstract: An encapsulated MEMS device and a method for manufacturing the MEMS device are provided. The method comprises providing a cavity structure having an inner volume comprising a plurality of MEMS elements, which are relatively displaceable with respect to each other, and having an opening structure to the inner volume, depositing a Self-Assembled Monolayer (SAM) through the opening structure onto exposed surfaces within the inner volume of the cavity structure, and closing the cavity structure by applying a layer structure on the opening structure for providing a hermetically closed cavity.
    Type: Application
    Filed: August 30, 2023
    Publication date: February 29, 2024
    Inventors: Fabian Streb, Johann Straßer, Hans-Jörg Timme, Marc Füldner, Arnaud Walther, Hutomo Suryo Wasisto
  • ELECTRO-DEIONIZATION CONTROL SYSTEM
    Publication number: 20150336820
    Abstract: A method and apparatus for operating an electro-deionization (EDI) module produces purified water using a power supply controller to provide more efficient and accurate operation.
    Type: Application
    Filed: January 8, 2014
    Publication date: November 26, 2015
    Inventors: Matthias GRABOSCH, Dennis Benjamin GROESCHE, Fabian WALTHER, Gaston DE LOS REYES