Abstract: A microelectromechanical system comprising an assembly of layers stacked in a stacking direction comprises an active layer made of single-crystal silicon comprising an active structure, and first and second covers defining a cavity around the active structure, the active layer interposed between the first and second covers, the second cover comprising a single layer made of single-crystal silicon. The assembly comprises a decoupling layer made of single-crystal silicon and comprising: an attaching element fastened to a carrier, a frame encircling the attaching element in the plane of the decoupling layer, and a mechanical decoupling structure connecting the frame and the attaching structure, the mechanical decoupling structure allowing the attaching element to be flexibly joined to the frame. The frame is secured to the silicon layer of the second cover and at most one film of silicon dioxide is interposed between the frame and silicon layer of the second cover.

Abstract: A microelectromechanical system comprising an assembly of layers stacked in a stacking direction comprises an active layer made of single-crystal silicon comprising an active structure, and first and second covers defining a cavity around the active structure, the active layer interposed between the first and second covers, the second cover comprising a single layer made of single-crystal silicon. The assembly comprises a decoupling layer made of single-crystal silicon and comprising: an attaching element fastened to a carrier, a frame encircling the attaching element in the plane of the decoupling layer, and a mechanical decoupling structure connecting the frame and the attaching structure, the mechanical decoupling structure allowing the attaching element to be flexibly joined to the frame. The frame is secured to the silicon layer of the second cover and at most one film of silicon dioxide is interposed between the frame and silicon layer of the second cover.

Abstract: A vibrating inertial sensor is provided, micro machined in a plane thin wafer, allowing the measurement of an angular position or of an angular speed. The sensor comprises two vibrating masses suspended by springs with identical stiffness in X and Y and coupled together by identical stiffness springs in X and Y, and at least excitation transducers and detection transducers disposed on at least one of the masses. The mobile assembly consisting of a vibrating mass and the parts of transducers fastened to this mass has a generally symmetric structure with respect to an axis of symmetry OX and with respect to an axis of symmetry OY.

Abstract: A vibrating inertial sensor is provided, micro machined in a plane thin wafer, allowing the measurement of an angular position or of an angular speed. The sensor comprises two vibrating masses suspended by springs with identical stiffness in X and Y and coupled together by identical stiffness springs in X and Y, and at least excitation transducers and detection transducers disposed on at least one of the masses. The mobile assembly consisting of a vibrating mass and the parts of transducers fastened to this mass has a generally symmetric structure with respect to an axis of symmetry OX and with respect to an axis of symmetry OY.

Abstract: Micro-mirror or micro-lens made up of a moving part (10) with a reflective or refringent zone (17), a fixed part (14), means of connection (13) of the moving part (10) to the fixed part (14) which forms an axis of rotation (12) for the moving part (10) and of means for controlling (18) the rotation. The means of control include two or more actuators (19) arranged either side of the axis (12), each formed of a fixed electrode (20) forming part of the fixed part (14) and a moving electrode (21) possessing a free end (21.1) and an end connected to a drive arm (23) which is substantially parallel to the axis (12) and emerging from the moving part (10). The moving electrode (21) adheres to the fixed electrode (20) from its free end (21.1) when a voltage is applied to the actuator (19), the adhesion is a function of the applied voltage. Application to optical systems.

Abstract: The inventive micro-mirror or micro-lens comprises a movable part (10) provided with a reflective or refringent area (17), a fixed part (14), elements (13) connecting the movable part (10) to the fixed part (14) and forming the axis of rotation (12) of the movable part (10) and rotation control elements (18). Said control elements comprise two or more actuators (19) which are disposed on both sides of the axis (12) and are formed by a fixed electrode (20) connected to the fixed part (14) and a movable electrode (21)provided with the free end (21.1) and the end thereof connected to a driving arm (23) which is arranged in a direction substentially parallel to the axis (12) and extended away from the movable part (10). The movable electrode (21) is applied to the fixed electrode (20) by the free end thereof (21.1) when a voltage is supplied to the actuator (19), the application pressure depends on the applied voltage. Said invention can be used for optical systems.

Abstract: The present invention relates to a micromirror comprising a mobile part with a reflecting area, a fixed part, two torsion arms originating from the mobile part materializing an axis about which the mobile part can oscillate, this axis being approximately parallel to a principal plane of the mobile part and passing through the mobile part while being offset from the center of mass of the mobile part, each torsion arm having one end connected to the fixed part through bimorph actuation means. The bimorph actuation means comprise a solid stack with deposited or add-on layers for each torsion arm, including a part made of an active material capable of changing volume and/or shape under the effect of an excitation, co-operating with a passive flexible structure.

Abstract: The present invention relates to a micromirror comprising a mobile part (11) with a reflecting area (19), a fixed part (12), two torsion arms (14) originating from the mobile part (11) materializing an axis (13) about which the mobile part (11) can oscillate, this axis (13) being approximately parallel to a principal plane of the mobile part (11) and passing through the mobile part (11) while being offset from the centre of mass (M) of the mobile part (11), each torsion arm (14) having one end (14.1) connected to the fixed part (12) through bimorph actuation means (15). The bimorph actuation means (15) comprise a solid stack (15.1) with deposited or add-on layers for each torsion arm (14), including a part (15.3) made of an active material capable of changing volume and/or shape under the effect of an excitation, co-operating with a passive flexible structure (15.2).