Patents by Inventor Fabrice Semond

Fabrice Semond has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10522346
    Abstract: The invention relates to a method for producing a support for the production of a semiconductor structure based on group III nitrides, characterised in that the method comprises the steps of: formation (100) of a buffer layer (20) on a substrate (10), said buffer layer comprising an upper surface layer based on group III nitrides, and deposition (200) of a crystalline layer (30) on the buffer layer, said crystalline layer being deposited from silicon atoms so as to cover the entire surface of the upper layer based on group III nitrides. The invention also relates to a support obtained by the method, to a semiconductor structure based on the support, and to the method for the production thereof.
    Type: Grant
    Filed: January 21, 2016
    Date of Patent: December 31, 2019
    Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
    Inventors: Fabrice Semond, Eric Frayssinet, Jean Massies
  • Patent number: 10361077
    Abstract: The invention relates to a method for producing a semiconductor structure, characterized in that the method comprises a step (201) of depositing a crystalline passivation layer continuously covering the entire surface of a layer based on group III nitrides, said crystalline passivation layer, which is deposited from a precursor containing silicon atoms and a flow of nitrogen atoms, consisting of silicon atoms bound to the surface of the layer based on group III nitrides and arranged in a periodical arrangement such that a diffraction image of said crystalline passivation layer obtained by grazing-incidence diffraction of electrons in the direction [1-100] comprises: two fractional order diffraction lines (0, ??) and (0, ??) between the central line (0, 0) and the integer order line (0, ?1), and two fractional order diffraction lines (0, ?) and (0, ?) between the central line (0, 0) and the integer order line (0, 1).
    Type: Grant
    Filed: January 21, 2016
    Date of Patent: July 23, 2019
    Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
    Inventors: Fabrice Semond, Eric Frayssinet, Jean Massies
  • Publication number: 20180019120
    Abstract: The invention relates to a method for producing a support for the production of a semiconductor structure based on group III nitrides, characterised in that the method comprises the steps of: formation (100) of a buffer layer (20) on a substrate (10), said buffer layer comprising an upper surface layer based on group III nitrides, and deposition (200) of a crystalline layer (30) on the buffer layer, said crystalline layer being deposited from silicon atoms so as to cover the entire surface of the upper layer based on group III nitrides. The invention also relates to a support obtained by the method, to a semiconductor structure based on the support, and to the method for the production thereof.
    Type: Application
    Filed: January 21, 2016
    Publication date: January 18, 2018
    Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
    Inventors: Fabrice SEMOND, Eric FRAYSSINET, Jean MASSIES
  • Publication number: 20180012753
    Abstract: The invention relates to a method for producing a semiconductor structure, characterised in that the method comprises a step (201) of depositing a crystalline passivation layer continuously covering the entire surface of a layer based on group III nitrides, said crystalline passivation layer, which is deposited from a precursor containing silicon atoms and a flow of nitrogen atoms, consisting of silicon atoms bound to the surface of the layer based on group III nitrides and arranged in a periodical arrangement such that a diffraction image of said crystalline passivation layer obtained by grazing-incidence diffraction of electrons in the direction [1-100] comprises: two fractional order diffraction lines (0, ??) and (0, ??) between the central line (0, 0) and the integer order line (0, ?1), and two fractional order diffraction lines (0, ?) and (0, ?) between the central line (0, 0) and the integer order line (0, 1).
    Type: Application
    Filed: January 21, 2016
    Publication date: January 11, 2018
    Applicant: Centre National de la Recherche Scientifique (CNRS)
    Inventors: Fabrice SEMOND, Eric FRAYSSINET, Jean MASSIES
  • Publication number: 20110084310
    Abstract: A method of manufacture of a optical, photonic or optoelectronic component, including a so-called photonic slab or membrane that is traversed, in at least one internal region and according to a predetermined pattern, by a plurality of through openings having a micrometric or sub-micrometric transverse dimension, the method having the following steps: structuring of the surface of a substrate by an etching that produces holes in the substrate according to the pattern; depositing at least one layer of the photonic material forming the slab or membrane, by anisotropic epitaxial growth on the structured surface of the substrate around the opening of the holes.
    Type: Application
    Filed: January 19, 2009
    Publication date: April 14, 2011
    Applicant: Universite Paris-Sud
    Inventors: Sylvain David, Philippe Boucaud, Fabrice Semond
  • Patent number: 7785991
    Abstract: A process is provided for integrating a III-N component, such as GaN, on a (001) or (100) nominal silicon substrate. There are arranged a texture of elementary areas each comprising an individual surface, with the texture comprising at least one hosting area intended to receive a III-N component. A mask layer is deposited on non-hosting areas which are not intended to receive a III-N type component. The hosting area is locally prepared so as to generate on the surface of the area one domain comprising one single type of terrace. There is grown by Molecular Beam Epitaxy or Metalorganic Vapor Phase Epitaxy on the hosting area one intermediary AlN buffer layer, followed by the growth of one III-N based material so as to realize a substantially monocrystalline structure. There is eliminated the mask layer located on non-hosting areas as well as surface polycrystalline layers deposited above the mask layers, and MOS/CMOS structures are subsequent integrated on at least some of the non-hosting areas.
    Type: Grant
    Filed: November 16, 2007
    Date of Patent: August 31, 2010
    Assignee: STMicroelectronics SA
    Inventors: Sylvain Joblot, Fabrice Semond, Jean Massies, Yvon Cordier, Jean-Yves Duboz
  • Patent number: 7776154
    Abstract: The invention concerns a monocrystalline coating crack-free coating of gallium nitride or mixed gallium nitride and another metal, on a substrate likely to cause extensive stresses in the coating, said substrate being coated with a buffer layer, wherein: at least a monocrystalline layer of a material having a thickness ranging between 100 and 300 nm, preferably between 200 and 250 nm, and whereof crystal lattice parameter is less than the crystal lattice parameter of the gallium nitride or of the mixed gallium nitride with another metal, is inserted in the coating of gallium nitride or mixed gallium nitride with another metal. The invention also concerns the method for preparing said coating. The invention further concerns electronic and optoelectronic devices comprising said coating.
    Type: Grant
    Filed: August 1, 2007
    Date of Patent: August 17, 2010
    Assignee: Picogiga International SAS
    Inventors: Fabrice Semond, Jean Claude Massies, Nicolas Pierre Grandjean
  • Patent number: 7767307
    Abstract: The invention concerns a monocrystalline coating crack-free coating of gallium nitride or mixed gallium nitride and another metal, on a substrate likely to cause extensive stresses in the coating, said substrate being coated with a buffer layer, wherein: at least a monocrystalline layer of a material having a thickness ranging between 100 and 300 nm, preferably between 200 and 250 nm, and whereof crystal lattice parameter is less than the crystal lattice parameter of the gallium nitride or of the mixed gallium nitride with another metal, is inserted in the coating of gallium nitride or mixed gallium nitride with another metal. The invention also concerns the method for preparing said coating. The invention further concerns electronic and optoelectronic devices comprising said coating.
    Type: Grant
    Filed: August 1, 2007
    Date of Patent: August 3, 2010
    Assignee: Centre National de la Recherche Scientifique
    Inventors: Fabrice Semond, Jean Claude Massies, Nicolas Pierre Grandjean
  • Publication number: 20090294776
    Abstract: Silicon layer highly sensitive to oxygen and method for obtaining said layer. This layer (2), formed on a substrate (4) for example of SiC, has a 3'2 structure. To obtain it, it is possible to substantially uniformly deposit silicon on a surface of the substrate. The invention can be applied for example to microelectronics.
    Type: Application
    Filed: July 4, 2006
    Publication date: December 3, 2009
    Applicants: Commissarita A L'Energie Atomique, Universite Paris Sud (Paris XI)
    Inventors: Patrick Soukiassian, Fabrice Semond
  • Publication number: 20080188065
    Abstract: The invention concerns a monocrystalline coating crack-free coating of gallium nitride or mixed gallium nitride and another metal, on a substrate likely to cause extensive stresses in the coating, said substrate being coated with a buffer layer, wherein: at least a monocrystalline layer of a material having a thickness ranging between 100 and 300 nm, preferably between 200 and 250 nm, and whereof crystal lattice parameter is less than the crystal lattice parameter of the gallium nitride or of the mixed gallium nitride with another metal, is inserted in the coating of gallium nitride or mixed gallium nitride with another metal. The invention also concerns the method for preparing said coating. The invention further concerns electronic and optoelectronic devices comprising said coating.
    Type: Application
    Filed: August 1, 2007
    Publication date: August 7, 2008
    Applicant: Centre National De La Recherche Scientifique (CNRS)
    Inventors: Fabrice SEMOND, Jean MASSIES, Nicolas GRANDJEAN
  • Publication number: 20080185611
    Abstract: The invention concerns a monocrystalline coating crack-free coating of gallium nitride or mixed gallium nitride and another metal, on a substrate likely to cause extensive stresses in the coating, said substrate being coated with a buffer layer, wherein: at least a monocrystalline layer of a material having a thickness ranging between 100 and 300 nm, preferably between 200 and 250 nm, and whereof crystal lattice parameter is less than the crystal lattice parameter of the gallium nitride or of the mixed gallium nitride with another metal, is inserted in the coating of gallium nitride or mixed gallium nitride with another metal. The invention also concerns the method for preparing said coating. The invention further concerns electronic and optoelectronic devices comprising said coating.
    Type: Application
    Filed: August 1, 2007
    Publication date: August 7, 2008
    Applicant: Centre National De La Recherche Scientifique (CNRS)
    Inventors: Fabrice SEMOND, Jean MASSIES, Nicolas GRANDJEAN
  • Publication number: 20080149936
    Abstract: A process is provided for integrating a III-N component, such as GaN, on a (001) or (100) nominal silicon substrate. There are arranged a texture of elementary areas each comprising an individual surface, with the texture comprising at least one hosting area intended to receive a III-N component. A mask layer is deposited on non-hosting areas which are not intended to receive a III-N type component. The hosting area is locally prepared so as to generate on the surface of the area one domain comprising one single type of terrace. There is grown by Molecular Beam Epitaxy or Metalorganic Vapor Phase Epitaxy on the hosting area one intermediary AlN buffer layer, followed by the growth of one III-N based material so as to realize a substantially monocrystalline structure. There is eliminated the mask layer located on non-hosting areas as well as surface polycrystalline layers deposited above the mask layers, and MOS/CMOS structures are subsequent integrated on at least some of the non-hosting areas.
    Type: Application
    Filed: November 16, 2007
    Publication date: June 26, 2008
    Applicant: STMICROELECTRONICS SA
    Inventors: SYLVAIN JOBLOT, Fabrice Semond, Jean Massies, Yvon Cordier, Jean-Yves Duboz
  • Publication number: 20080050894
    Abstract: The invention concerns a monocrystalline coating crack-free coating of gallium nitride or mixed gallium nitride and another metal, on a substrate likely to cause extensive stresses in the coating, said substrate being coated with a buffer layer, wherein: at least a monocrystalline layer of a material having a thickness ranging between 100 and 300 nm, preferably between 200 and 250 nm, and whereof crystal lattice parameter is less than the crystal lattice parameter of the gallium nitride or of the mixed gallium nitride with another metal, is inserted in the coating of gallium nitride or mixed gallium nitride with another metal. The invention also concerns the method for preparing said coating. The invention further concerns electronic and optoelectronic devices comprising said coating.
    Type: Application
    Filed: August 1, 2007
    Publication date: February 28, 2008
    Applicant: PICOGIGA INTERNATIONAL SAS
    Inventors: Fabrice SEMOND, Jean MASSIES, Nicolas GRANDJEAN
  • Publication number: 20080048207
    Abstract: The invention concerns a monocrystalline coating crack-free coating of gallium nitride or mixed gallium nitride and another metal, on a substrate likely to cause extensive stresses in the coating, said substrate being coated with a buffer layer, wherein: at least a monocrystalline layer of a material having a thickness ranging between 100 and 300 nm, preferably between 200 and 250 nm, and whereof crystal lattice parameter is less than the crystal lattice parameter of the gallium nitride or of the mixed gallium nitride with another metal, is inserted in the coating of gallium nitride or mixed gallium nitride with another metal. The invention also concerns the method for preparing said coating. The invention further concerns electronic and optoelectronic devices comprising said coating.
    Type: Application
    Filed: August 1, 2007
    Publication date: February 28, 2008
    Applicant: PICOGIGA INTERNATIONAL SAS
    Inventors: Fabrice SEMOND, Jean MASSIES, Nicolas GRANDJEAN
  • Patent number: 7273664
    Abstract: The invention concerns a monocrystalline coating crack-free coating of gallium nitride or mixed gallium nitride and another metal, on a substrate likely to cause extensive stresses in the coating, said substrate being coated with a buffer layer, wherein: at least a monocrystalline layer of a material having a thickness ranging between 100 and 300 nm, preferably between 200 and 250 nm, and whereof crystal lattice parameter is less than the crystal lattice parameter of the gallium nitride or of the mixed gallium nitride with another metal, is inserted in the coating of gallium nitride or mixed gallium nitride with another metal. The invention also concerns the method for preparing said coating. The invention further concerns electronic and optoelectronic devices comprising said coating.
    Type: Grant
    Filed: June 8, 2001
    Date of Patent: September 25, 2007
    Assignee: Picogiga International SAS
    Inventors: Fabrice Semond, Jean Claude Massies, Nicolas Pierre Grandjean
  • Publication number: 20040132242
    Abstract: According to the invention, parallel atomic lines (4) are formed on the surface of a substrate (2) in silicon carbide, and a material is deposited on this surface, able to be adsorbed selective fashion between the atomic lines and not on these atomic lines, the depositing of this material thereby generating strips (6,8) of this material between the atomic lines.
    Type: Application
    Filed: October 20, 2003
    Publication date: July 8, 2004
    Inventors: Marie D'Angelo, Victor Aristov, Vincent Derycke, Fabrice Semond, Patrick Soukiassian
  • Publication number: 20030136333
    Abstract: The invention concerns a monocrystalline coating crack-free coating of gallium nitride or mixed gallium nitride and another metal, on a substrate likely to cause extensive stresses in the coating, said substrate being coated with a buffer layer, wherein: at least a monocrystalline layer of a material having a thickness ranging between 100 and 300 nm, preferably between 200 and 250 nm, and whereof crystal lattice parameter is less than the crystal lattice parameter of the gallium nitride or of the mixed gallium nitride with another metal, is inserted in the coating of gallium nitride or mixed gallium nitride with another metal. The invention also concerns the method for preparing said coating. The invention further concerns electronic and optoelectronic devices comprising said coating.
    Type: Application
    Filed: December 9, 2002
    Publication date: July 24, 2003
    Inventors: Fabrice Semond, Jean Claude Massies, Nicolas Pierre Grandjean
  • Patent number: 6445009
    Abstract: A device includes a silicon substrate provided with a coating including at least one stacking constituted by a plane of GaN or GaInN quantum dots emitting visible light at room temperature in a respective layer of AIN or GaN. The method of making the device is also disclosed. The device can be incorporated in electroluminescent devices and exchange devices, emitting white light in particular.
    Type: Grant
    Filed: August 8, 2000
    Date of Patent: September 3, 2002
    Assignee: Centre National de la Recherche Scientifique
    Inventors: Nicolas Pierre Grandjean, Jean Massies, Benjamin Gérard Pierre Damilano, Fabrice Semond, Mathieu Leroux
  • Patent number: 6274234
    Abstract: Atomic wires of great length and great stability are formed on the surface of a SiC substrate as straight chains of dimers of an element chosen from amongst SiC and C. In order to produce same, layers of the element are formed on the surface and the assembly is constructed by means of annealings of the surface provided with the layers. The resulting wires have application to nanoelectronics.
    Type: Grant
    Filed: June 14, 1999
    Date of Patent: August 14, 2001
    Assignees: Commissariat a l'Energie Atomique, Centre National de la Recherche Scientifique
    Inventors: Gérald Dujardin, Andrew Mayne, Fabrice Semond, Patrick Soukiassian