Patents by Inventor Fadi EL-GHUSSEIN

Fadi EL-GHUSSEIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Variable diffraction grating
    Patent number: 11703771
    Abstract: A calibration system includes a plate, a fixed alignment mark, and a variable diffraction grating. The plate is adjacent to a wafer alignment mark disposed on a wafer. The fixed alignment mark is disposed on the plate and is configured to act as a reference mark for an initial calibration of the calibration system. The variable diffraction grating is disposed on the plate and includes a plurality of unit cells configured to form a plurality of variable alignment marks. The variable diffraction grating is configured to calibrate a shift-between-orders of one of the variable alignment marks and the fixed alignment mark.
    Type: Grant
    Filed: October 12, 2020
    Date of Patent: July 18, 2023
    Assignees: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Ali Alsaqqa, Fadi El-Ghussein, Lambertus Gerardus Maria Kessels, Roxana Rezvani Naraghi, Krishanu Shome, Timothy Allan Brunner, Sergei Sokolov
  • VARIABLE DIFFRACTION GRATING
    Publication number: 20220390861
    Abstract: A calibration system includes a plate, a fixed alignment mark, and a variable diffraction grating. The plate is adjacent to a wafer alignment mark disposed on a wafer. The fixed alignment mark is disposed on the plate and is configured to act as a reference mark for an initial calibration of the calibration system. The variable diffraction grating is disposed on the plate and includes a plurality of unit cells configured to form a plurality of variable alignment marks. The variable diffraction grating is configured to calibrate a shift-between-orders of one of the variable alignment marks and the fixed alignment mark.
    Type: Application
    Filed: October 12, 2020
    Publication date: December 8, 2022
    Applicants: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Ali ALSAQQA, Fadi EL-GHUSSEIN, Lambertus Gerardus Maria KESSELS, Roxana REZVANI NARAGHI, Krishanu SHOME, Timothy Allan BRUNNER, Sergei SOKOLOV