Patents by Inventor Falk Bednara

Falk Bednara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer lifting device
    Patent number: 7180283
    Abstract: The invention, which relates to a wafer lifting device having a lifting platform arranged under a wafer receptacle, which lifting platform can be moved in the vertical direction and at least three pins which can be moved in through holes in the wafer receptacle. The pins are separately guided in the through holes. A pin is guided and held such that it can be moved longitudinally, and the pin guide is fixedly connected to the wafer receptacle.
    Type: Grant
    Filed: July 17, 2003
    Date of Patent: February 20, 2007
    Assignee: Infineon Technologies, AG
    Inventors: Rudiger Hunger, Steffen Herberg, Falk Bednara
  • Wafer lifting device
    Publication number: 20040051220
    Abstract: The invention, which relates to a wafer lifting device having a lifting platform arranged under a wafer receptacle, which lifting platform can be moved in the vertical direction and at least three pins which can be moved in through holes in the wafer receptacle. The pins are separately guided in the through holes. A pin is guided and held such that it can be moved longitudinally, and the pin guide is fixedly connected to the wafer receptacle.
    Type: Application
    Filed: July 17, 2003
    Publication date: March 18, 2004
    Inventors: Rudiger Hunger, Steffen Herberg, Falk Bednara