Patents by Inventor Fan Cheung Sze

Fan Cheung Sze has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9387521
    Abstract: A method of wet cleaning an aluminum part having bare aluminum surfaces and anodized aluminum surfaces. The method includes CO2 dry ice blasting the surfaces of the aluminum part at approximately 35 to approximately 45 psi, masking the aluminum part to conceal the bare aluminum surfaces, soaking the dry ice blasted and masked aluminum part in deionized water at or above approximately 60° C., scrubbing the aluminum part with an abrasive pad and deionized water after completion of the soaking in deionized water, and repeating the soaking and scrubbing in the recited order at least three additional times.
    Type: Grant
    Filed: September 30, 2013
    Date of Patent: July 12, 2016
    Assignee: Lam Research Corporation
    Inventors: Hong Shih, Fan-Cheung Sze, Brian McMillin, John Daugherty, Yan Fang, Duane Outka, Tuochuan Huang, Sivakami Ramanathan
  • Publication number: 20140150819
    Abstract: A method of wet cleaning an aluminum part having bare aluminum surfaces and anodized aluminum surfaces. The method includes CO2 dry ice blasting the surfaces of the aluminum part at approximately 35 to approximately 45 psi, masking the aluminum part to conceal the bare aluminum surfaces, soaking the dry ice blasted and masked aluminum part in deionized water at or above approximately 60° C., scrubbing the aluminum part with an abrasive pad and deionized water after completion of the soaking in deionized water, and repeating the soaking and scrubbing in the recited order at least three additional times.
    Type: Application
    Filed: September 30, 2013
    Publication date: June 5, 2014
    Applicant: Lam Research Corporation
    Inventors: Hong Shih, Fan-Cheung Sze, Brian McMillin, John Daugherty, Yan Fang, Duane Outka, Tuochuan Huang, Sivakami Ramanathan
  • Patent number: 7625063
    Abstract: In a first aspect, a first apparatus is provided for inkjet printing. The first apparatus includes an inkjet head support that includes a plurality of inkjet heads. A first inkjet head of the plurality of inkjet heads is adapted to be independently moveable in both directions along a lateral axis relative to a second inkjet head of the plurality of inkjet heads. The first apparatus also includes a system controller adapted to control an independent lateral movement of the first inkjet head relative to the second inkjet head. Numerous other aspects are provided.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: December 1, 2009
    Assignee: Applied Materials, Inc.
    Inventors: John M. White, Fan Cheung Sze, Quanyuan Shang, Shinichi Kurita, Hongbin Ji, Janusz Jozwiak, Inchen Huang, Emanual Beer
  • Publication number: 20090267975
    Abstract: In a first aspect, a system is provided. The system includes (1) a stage adapted to move a substrate relative to print heads during printing; (2) at least one print head suspended from a support above the stage and adapted to be moveable in a plane above the stage; (3) a controller operable to rotate the print head about a center of the print head; and (4) an imaging system adapted to capture an image of the print head and to determine a center point of the print head based upon images of the print head captured as the print head is rotated. Numerous other aspects are provided.
    Type: Application
    Filed: July 6, 2009
    Publication date: October 29, 2009
    Applicant: APPLIED MATERIALS, INC.
    Inventors: John M. White, Fan Cheung Sze, Quanyuan Shang, Shinichi Kurita, Hongbin Ji, Janusz Jozwiak, Inchen Huang, Emanual Beer
  • Patent number: 7556334
    Abstract: In a first aspect, a system is provided. The system includes (1) a stage adapted to move a substrate relative to print heads during printing; (2) at least one print head suspended from a support above the stage and adapted to be moveable in a plane above the stage; (3) a controller operable to rotate the print head about a center of the print head; and (4) an imaging system adapted to capture an image of the print head and to determine a center point of the print head based upon images of the print head captured as the print head is rotated. Numerous other aspects are provided.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: July 7, 2009
    Assignee: Applied Materials, Inc.
    Inventors: John M. White, Fan Cheung Sze, Quanyuan Shang, Shinichi Kurita, Hongbin Ji, Janusz Jozwiak, Inchen Huang, Emanual Beer
  • Publication number: 20080291228
    Abstract: According to the present invention, multiple rows of nozzles within a print head may be arranged proximal to and offset from each other to facilitate inkjet printing. Print heads may comprise a single row of nozzles or may comprise a plurality of rows of nozzles. Each row of nozzles may be situated such that the immediately adjacent row of nozzles may be offset by a predetermined distance. In some embodiments, adjacent rows of nozzles may each print with the same color. In this way, adjacent offset rows of nozzles may be used in combination to dispense ink drops into sub-pixel wells in improved patterns and with improved ink distribution within the sub-pixel well. These offset print techniques may also enable tighter grouping of ink drops within a sub-pixel well and enable faster printing operations.
    Type: Application
    Filed: May 21, 2007
    Publication date: November 27, 2008
    Inventors: JOHN M. WHITE, Fan-Cheung Sze, Quanyuan Shang, Shinichi Kurita, Hongbin Ji, Janusz Jozwiak, Inchen Huang, Emanuel Beer
  • Publication number: 20080024548
    Abstract: The invention provides an inkjet printing apparatus that includes at least one inkjet print head adapted to dispense fluids onto a substrate and at least one delivery aperture adapted to direct a gas toward the substrate. The apparatus may also include at least one recovery aperture adapted to draw materials away from the substrate and evaporate liquids from the surface of the substrate.
    Type: Application
    Filed: July 26, 2006
    Publication date: January 31, 2008
    Applicant: Applied Materials, Inc.
    Inventors: Quanyuan Shang, Fan Cheung Sze, Josef Hoog, Lizhong Sun, John M. White
  • Publication number: 20070076040
    Abstract: Methods and apparatus are provided for calibrating inkjet print nozzles that include dispensing a plurality of ink drops onto a surface with one or more inkjet print nozzles at a firing pulse voltage, measuring a parameter of the ink drops, and calibrating the firing pulse voltage of at least one of the one or more inkjet print nozzles based on the measured parameter of the ink drops.
    Type: Application
    Filed: July 19, 2006
    Publication date: April 5, 2007
    Applicant: Applied Materials, Inc.
    Inventors: Quanyuan Shang, Fan-Cheung Sze
  • Publication number: 20070068560
    Abstract: Methods and apparatus for cleaning a nozzle plate of an inkjet print head are provided. A first method includes positioning a cleaning medium proximate the inkjet print head, determining a pressure for a pressure roller to apply against the cleaning medium, contacting the cleaning medium with the pressure roller with the determined pressure, and moving the cleaning medium relative to the inkjet print head so as to clean the inkjet print head. The method also includes purging ink from the inkjet print head prior to the pressure roller contacting the cleaning medium and pre-jetting ink from the inkjet print head after moving the cleaning medium. Numerous other aspects are provided.
    Type: Application
    Filed: September 29, 2005
    Publication date: March 29, 2007
    Inventors: Quanyuan Shang, Shinichi Kurita, Fan-Cheung Sze
  • Publication number: 20070070132
    Abstract: A cabinet for housing an ink supply is provided for use with an inkjet printing system. The cabinet, ink supply, and related structures are set apart from inkjet print heads in the inkjet printing system. Accordingly, the cabinet provides a location to store and supply quantities of ink and may make service and replacement of parts and/or consumables simpler and more accessible. The cabinet also houses components used to process and/or supply ink to inkjet print heads such as solvent, fluid delivery mechanisms (e.g., pumps, gas pressure devices, etc.), tubes, sensors, filters, exhaust, and drainage.
    Type: Application
    Filed: September 26, 2006
    Publication date: March 29, 2007
    Inventors: Fan-Cheung Sze, Quanyuan Shang, Shinichi Kurita
  • Publication number: 20060159843
    Abstract: A method for treating a glass substrate and a black matrix thereon for a flat panel display is provided. In one application, the treatment of the glass substrate and black matrix is performed prior to delivery of ink to the glass substrate by an inkjet printing system. The black matrix and glass substrate are exposed to a surface active compound. In one aspect, exposing the black matrix and the glass substrate to a surface active compound modifies the surface energy of the black matrix, the surface energy of the glass substrate, or both. In another aspect, treating the black matrix and the glass substrate enhances the formation of color filters having sub-pixel wells that have a substantially uniform distribution of ink therein.
    Type: Application
    Filed: January 18, 2005
    Publication date: July 20, 2006
    Inventors: Fan-Cheung Sze, Quanyuan Shang, John White
  • Publication number: 20050253917
    Abstract: A method for forming color filters for flat panel displays comprising dispensing color inks into a pre-patterned matrix using an inkjet device and curing the dispensed color inks. In one aspect, the color inks are cured in a concave configuration. In another aspect, the color inks are cured using electron beam, laser, X-ray, or other suitable high energy source.
    Type: Application
    Filed: May 13, 2004
    Publication date: November 17, 2005
    Inventors: Quanyuan Shang, Fan Cheung Sze, John White
  • Publication number: 20030203123
    Abstract: A cluster tool for forming a poly-Si layer on a substrate comprises (i) a first chamber for depositing silicon onto the substrate to form an a-Si layer on the substrate, (ii) a second chamber for depositing onto the a-Si layer a metal that is capable of inducing nucleation sites in a-Si, and (iii) a third chamber for annealing the &agr;-Si layer, thereby forming the poly-Si layer on the substrate. In one embodiment, the second chamber is a plasma enhanced chemical vapor deposition (PECVD) reactor that includes an upper electrode. An outer surface of the upper electrode is made of a metal that is capable of inducing the nucleation sites. In this embodiment, the metal is deposited onto the substrate from the upper electrode when a plasma is generated between the upper electrode and a lower electrode in the PECVD reactor, thereby causing deposition of the metal onto the substrate.
    Type: Application
    Filed: April 26, 2002
    Publication date: October 30, 2003
    Applicant: Applied Materials, Inc.
    Inventors: Quanyaun Shang, Fan Cheung Sze, Robert I. Greene, Janine Kardokus, Beom Soo Park, Soo Young Choi, Tae Kyung Won, Qunhua Wang, William R. Harshbarger
  • Publication number: 20010025607
    Abstract: Plasma reactor having a generally cylindrical reaction chamber which is substantially greater in diameter than in height, a generally cylindrical waveguide which is aligned axially with the reaction chamber, and a window which separates the waveguide from the reaction chamber and permits microwave energy to pass from the waveguide to chamber to ionize gas and form a plasma in the chamber. In some embodiments, the microwave energy is applied initially in pulses and thereafter as a continuous wave in order to avoid the need for retuning upon ignition of the plasma, and in others the need for retuning is avoided by the use of fins which lock in a desired mode of operation.
    Type: Application
    Filed: December 20, 2000
    Publication date: October 4, 2001
    Inventors: Tony Lebar, Fan Cheung Sze, John T. Davies