Patents by Inventor Fang-Pin CHIANG

Fang-Pin CHIANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220336235
    Abstract: A semiconductor device manufacturing system and a method for manufacturing semiconductor device are provided. The semiconductor device manufacturing system comprises a valve box module, a controller, a purge gas source and at least one semiconductor manufacturing tool. The valve box module includes at least one stick and a first gas line in fluid communication with the at least one stick. Further, the first gas line includes a pneumatic valve and a pressure transmitter downstream of the pneumatic valve. The controller connects to the pneumatic valve and the pressure transmitter of the first gas line. The purge gas source is in fluid communication with the first gas line. The at least one semiconductor manufacturing tool is coupled to the at least one stick.
    Type: Application
    Filed: April 16, 2021
    Publication date: October 20, 2022
    Inventors: FANG-PIN CHIANG, HENG-YI TSENG, CHI-TUNG LAI, SHUN CHAN TENG, HUNG-CHIEH CHEN
  • Publication number: 20220306449
    Abstract: A liquid supply system is provided. The liquid supply system includes a liquid tank configured to store a liquid. The liquid supply system also includes a liquid measurement module positioned outside the liquid tank and fluidly connected two connecting ports that are located at opposite sides of a surface of the liquid stored in the liquid tank, The liquid tank includes a tube extends parallel to a height direction of the liquid tank. The liquid tank also includes a floating member located in the tube and configured to float on the liquid. The liquid tank further includes a detection member configured to emit a detection signal toward the floating member.
    Type: Application
    Filed: March 26, 2021
    Publication date: September 29, 2022
    Inventors: FANG-PIN CHIANG, CHI-TUNG LAI, HENG-YI TSENG
  • Publication number: 20210375645
    Abstract: A chemical dispensing system is capable of simultaneously supplying a semiconductor processing chemical for production and testing through the use of independent chemical supply lines, which reduces production downtime of an associated semiconductor process, increases throughput and capability of the semiconductor process, and/or the like. Moreover, the capability to simultaneously supply the semiconductor processing chemical for production and testing allows for an increased quantity of semiconductor processing chemical batches to be tested with minimal impact to production, which increases quality control over the semiconductor processing chemical. In addition, the independent chemical supply lines may be used to supply the semiconductor processing chemical to production while independently filtering semiconductor processing chemical directly from a storage drum through a filtration loop.
    Type: Application
    Filed: May 29, 2020
    Publication date: December 2, 2021
    Inventors: Ming-Chieh HSU, Yung-Long CHEN, Fang-Pin CHIANG, Feng-An YANG, Ching-Jung HSU, Chi-Tung LAI