Patents by Inventor Fang-Tsun Chu

Fang-Tsun Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11075162
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: July 27, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Publication number: 20200251416
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Application
    Filed: April 20, 2020
    Publication date: August 6, 2020
    Inventors: Wei Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Patent number: 10629528
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: April 21, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Publication number: 20190252315
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Application
    Filed: April 22, 2019
    Publication date: August 15, 2019
    Inventors: Wei Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Patent number: 10269699
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Grant
    Filed: January 26, 2018
    Date of Patent: April 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Patent number: 10262989
    Abstract: An integrated circuit structure includes first and second integrated circuit devices disposed on a interposer. Each integrated circuit device has electrostatic discharge (ESD) protection circuitry therein connected to an internal ESD bus. The first and second integrated circuit devices communicate with one another through the interposer. The interposer includes an ESD bus electrically connected to the ESD busses of the first and second integrated circuit devices for providing cross-device ESD protection for the integrated circuit devices.
    Type: Grant
    Filed: December 8, 2015
    Date of Patent: April 16, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Hui Chen, Fang-Tsun Chu
  • Publication number: 20180151492
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Application
    Filed: January 26, 2018
    Publication date: May 31, 2018
    Inventors: Wei-Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Patent number: 9893010
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Grant
    Filed: July 20, 2016
    Date of Patent: February 13, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Publication number: 20160329280
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Application
    Filed: July 20, 2016
    Publication date: November 10, 2016
    Inventors: Wei-Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Patent number: 9406607
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Grant
    Filed: October 21, 2013
    Date of Patent: August 2, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Publication number: 20160093606
    Abstract: An integrated circuit structure includes first and second integrated circuit devices disposed on a interposer. Each integrated circuit device has electrostatic discharge (ESD) protection circuitry therein connected to an internal ESD bus. The first and second integrated circuit devices communicate with one another through the interposer. The interposer includes an ESD bus electrically connected to the ESD busses of the first and second integrated circuit devices for providing cross-device ESD protection for the integrated circuit devices.
    Type: Application
    Filed: December 8, 2015
    Publication date: March 31, 2016
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Hui CHEN, Fang-Tsun CHU
  • Patent number: 9245852
    Abstract: An integrated circuit structure includes first and second integrated circuit devices disposed on a interposer. Each integrated circuit device has electrostatic discharge (ESD) protection circuitry therein connected to an internal ESD bus. The first and second integrated circuit devices communicate with one another through the interposer. The interposer includes an ESD bus electrically connected to the ESD busses of the first and second integrated circuit devices for providing cross-device ESD protection for the integrated circuit devices.
    Type: Grant
    Filed: September 8, 2011
    Date of Patent: January 26, 2016
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chia-Hui Chen, Fang-Tsun Chu
  • Patent number: 9117677
    Abstract: The present application discloses a semiconductor integrated circuit including a substrate having electrical devices formed thereon, a local interconnection layer formed over the substrate, and a global interconnection layer formed over the local interconnection layer. The local interconnection layer has a first set of conductive structures arranged to electrically connect within the individual electrical devices, among one of the electrical devices and its adjacent electrical devices, or vertically between the devices and the global interconnection layer. At least one of the first set of conductive structures is configured to have a resistance value greater than 50 ohms. The global interconnection layer has a second set of conductive structures arranged to electrically interconnect the electrical devices via the first set conductive structures.
    Type: Grant
    Filed: October 13, 2011
    Date of Patent: August 25, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wei Yu Ma, Kuo-Ji Chen, Fang-Tsun Chu, Ta-Pen Guo
  • Publication number: 20140042557
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Application
    Filed: October 21, 2013
    Publication date: February 13, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wei Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Patent number: 8569129
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Grant
    Filed: May 31, 2011
    Date of Patent: October 29, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Publication number: 20130093052
    Abstract: The present application discloses a semiconductor integrated circuit including a substrate having electrical devices formed thereon, a local interconnection layer formed over the substrate, and a global interconnection layer formed over the local interconnection layer. The local interconnection layer has a first set of conductive structures arranged to electrically connect within the individual electrical devices, among one of the electrical devices and its adjacent electrical devices, or vertically between the devices and the global interconnection layer. At least one of the first set of conductive structures is configured to have a resistance value greater than 50 ohms. The global interconnection layer has a second set of conductive structures arranged to electrically interconnect the electrical devices via the first set conductive structures.
    Type: Application
    Filed: October 13, 2011
    Publication date: April 18, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wei Yu MA, Kuo-Ji CHEN, Fang-Tsun CHU, Ta-Pen GUO
  • Publication number: 20130063843
    Abstract: An integrated circuit structure includes first and second integrated circuit devices disposed on a interposer. Each integrated circuit device has electrostatic discharge (ESD) protection circuitry therein connected to an internal ESD bus. The first and second integrated circuit devices communicate with one another through the interposer. The interposer includes an ESD bus electrically connected to the ESD busses of the first and second integrated circuit devices for providing cross-device ESD protection for the integrated circuit devices.
    Type: Application
    Filed: September 8, 2011
    Publication date: March 14, 2013
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Hui CHEN, Fang-Tsun CHU
  • Publication number: 20120306023
    Abstract: A method includes forming a transistor at a surface of a semiconductor substrate, wherein the step of forming the transistor comprises forming a gate electrode, and forming a source/drain region adjacent the gate electrode. First metal features are formed to include at least portions at a same level as the gate electrode. Second metal features are formed simultaneously, and are over and contacting the first metal features. A first one of the second metal features is removed and replaced with a third metal feature, wherein a second one of the second metal features is not removed. A fourth metal feature is formed directly over and contacting the gate electrode, wherein the third and the fourth metal features are formed using a same metal-filling process.
    Type: Application
    Filed: May 31, 2011
    Publication date: December 6, 2012
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei Yu Ma, Fang-Tsun Chu, Kvei-Feng Yen, Yao-Bin Wang
  • Patent number: 8179647
    Abstract: An ESD clamp includes a first power supply node; an ESD detection circuit coupled to the first power supply node and configured to detect an ESD event; and a bias circuit coupled to the first power supply node and configured to output a second power supply voltage to a second power supply node. The second power supply voltage is lower than a first power supply voltage on the first power supply node. The ESD detection circuit is configured to activate the bias circuit to change working state in response to the ESD event. The ESD clamp further includes an LV ESD clamp coupled to the second power supply node, wherein the LV ESD clamp includes LV devices with maximum endurable voltages lower than the first power supply voltage.
    Type: Grant
    Filed: October 4, 2010
    Date of Patent: May 15, 2012
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Fang-Tsun Chu, Kuo-Ji Chen
  • Publication number: 20120081820
    Abstract: An ESD clamp includes a first power supply node; an ESD detection circuit coupled to the first power supply node and configured to detect an ESD event; and a bias circuit coupled to the first power supply node and configured to output a second power supply voltage to a second power supply node. The second power supply voltage is lower than a first power supply voltage on the first power supply node. The ESD detection circuit is configured to activate the bias circuit to change working state in response to the ESD event. The ESD clamp further includes an LV ESD clamp coupled to the second power supply node, wherein the LV ESD clamp includes LV devices with maximum endurable voltages lower than the first power supply voltage.
    Type: Application
    Filed: October 4, 2010
    Publication date: April 5, 2012
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Fang-Tsun Chu, Kuo-Ji Chen