Abstract: A method for forming a plurality of devices on a substrate is disclosed. The method includes providing an oxide layer over the substrate, forming diffused regions in the plurality of devices, and performing at least one high-energy implant in the diffused regions. The diffused regions are buried and driven. Oxide layer is then removed. The method also includes depositing an epitaxial layer over the diffused regions, such that the diffused regions are buried under the epitaxial layer, in a single row.