Abstract: A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirro rassembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400).

Abstract: According to the present invention there is provided an actuator comprising, a movable member, the movable member comprising a support frame which is configured such that it can oscillate about a first oscillation axis and a mirror which is fixed to the support frame such that oscillation of the support frame will effect oscillation of the mirror; an coil, which cooperates with the support frame; one or more boundary portions provided between the support frame and the mirror which reduce the influence of warp transmitted from an edge of the support frame to the mirror, as the support frame oscillates about the first oscillation axis; wherein the support frame further comprises one or more cut-out regions, wherein the one or more cut-out regions are configured to be parallel to at least a portion of the coil, to reduce stress on the coil as the support frame oscillates about the first oscillation axis and/or to reduce the temperature dependence of the properties of the actuator.

Abstract: Optical MEMS scanning micro-mirror comprising: —a movable scanning micro-mirror (101) pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror; —an transparent prism (500, 600) substantially covering the reflection side of the micro-mirror; —wherein said prism has its outer face non-parallel to the micro-mirror neutral plane N-N, thereby providing a dual anti-speckle and anti-reflection effect, namely against parasitic light. The invention also provides the corresponding micro-projection system and method for reducing speckle.

Abstract: A reflective device comprising, a comprising, a movable element which comprises a reflective surface, wherein the movable element can oscillate about at least one oscillation axis to scan light; one or more holder elements which co-operate with the movable element to hold the movable element in a manner which will allow the movable element to oscillate about the at least one oscillation axis to scan light, wherein the one or more holder elements are configured to define a region which can receive at least a portion of the movable element as the movable element oscillates when the reflective device is mounted on a surface; a magnetic element which is secured to a fixed part of the reflective device; one or more electrically conductive means positioned on the movable element so that one or more electrically conductive means can operatively co-operate with a magnetic field provided by the magnetic element to effect oscillation of the moveable element, wherein the one or more electrically conductive means are com

Abstract: Optical MEMS scanning micro-mirror comprising: —a movable scanning micro-mirror (101), being pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror, —a transparent window (202) substantially covering the reflection side of the micro-mirror; —wherein a piezo-actuator assembly (500) and a layer of deformable transparent material (501) are provided on the outer portion of said window (202); —the piezo-actuator assembly (500) being arranged at the periphery of the layer of transparent material (501); —said piezo-actuator assembly (500) and transparent material (501) cooperating so that when actuated, the piezo-actuator assembly (500) causes micro-deformation of the transparent material (501), thereby providing an anti-speckle effect. The invention also provides the corresponding micro-projection system and method for reducing speckle.

Abstract: Optical MEMS scanning micro-mirror comprising:—a movable scanning micro-mirror (101) pivotally connected to a MEMS body (102) substantially surrounding the lateral sides of the micro-mirror;—an transparent prism (500, 600) substantially covering the reflection side of the micro-mirror;—wherein said prism has its outer face non-parallel to the micro-mirror neutral plane N-N, thereby providing a dual anti-speckle and anti-reflection effect, namely against parasitic light. The invention also provides the corresponding micro-projection system and method for reducing speckle.

Abstract: A micro-projection system for projecting light on a projection surface (104), comprising: at least one coherent light source (101); optical elements (102, 108, 109) in the optical path between said coherent light source and said projection surface; said optical elements including at least one reflective member (102) actuated by a drive signal for deviating light from said light source so as to scan a projected image onto said projecting surface; said optical elements including at least one pixel displacement unit (106) for providing a displacement signal synchronized with the image scanning signal so as to reduce speckle onto said projecting surface. The corresponding method for reducing speckle is also provided.

Abstract: A method for fabricating a micromirror in a wafer, including the steps of: depositing and etching layers forming two arms; etching the wafer such that in the back face only a thin portion of the wafer remains in the region of formation of the micromirror and the arms; performing an anisotropic etch, such that the thin portion remains only in the areas of the micromirror and the arms; and performing an isotropic etch to remove the thin portions under the arms, the etching step for forming the arms being performed following their shape and so as to form holes traversing the arms, the holes being positioned at edges of the region separating the micromirror and the wafer on both the side of the micromirror and the side of the portions of the wafer remaining after the anisotropic etching step. The invention also concerns the micromirror.

Abstract: A micro-projection system for projecting light on a projection surface, comprising: —at least one coherent light source (101); —optical elements (102, 108, 109) in the optical path between said coherent light source and said projection surface; —said optical elements including at least one reflective member (102) actuated by a drive signal for deviating light from said light source so as to scan a projected image onto said projecting surface; —said optical elements including at least one vibrating element (102) actuated by a vibrating signal so as to reduce speckle onto said projecting surface. The corresponding method for reducing speckle is also provided.

Abstract: An optical micro-projection system has at least one light source (401), at least one mirror (200) based on MEMS technology for deviating light from said light source, at least one beam splitter (403), and at least one wave plate (400). Each component has parallelepiped profiles with contact faces (500) on at least one side. Mutual alignment of at least two of the components is provided by mutual direct contact between reference contact faces (500) of the components. The architecture enables avoiding the use of dynamic optical assembly methods and to minimize the light loss within the system.

Abstract: An optical micro-projection system comprising the following components: at least one laser light source (200, 400, 402, 600); at least one movable mirror (102, 103, 203) for deviating light from said light source to allow generation of images on a projection surface (104, 301, 303, 306, 603); a self mixing module for measurement of the distance (604) between the projection source and a projection surface, said self mixing module comprising:—at least one photodiode (401, 601) for monitoring the light emission power of the laser light source;—an optical power variation counter for counting optical power variations (605); successive displacements of said mirror allowing the self mixing module providing successive projection distance measurements of a plurality of points of said projection surface. A projection method for optical micro-projection system and a distance measurement method are also provided.

Abstract: An optical micro-projection system has at least one light source (401), at least one mirror (200) based on MEMS technology for deviating light from said light source, at least one beam splitter (403), and at least one wave plate (400). Each component has parallelepiped profiles with contact faces (500) on at least one side. Mutual alignment of at least two of the components is provided by mutual direct contact between reference contact faces (500) of the components. The architecture enables avoiding the use of dynamic optical assembly methods and to minimize the light loss within the system.

Abstract: A method for fabricating a micromirror in a wafer, including the steps of: depositing and etching layers forming two arms; etching the wafer such that in the back face only a thin portion of the wafer remains in the region of formation of the micromirror and the arms; performing an anisotropic etch, such that the thin portion remains only in the areas of the micromirror and the arms; and performing an isotropic etch to remove the thin portions under the arms, the etching step for forming the arms being performed following their shape and so as to form holes traversing the arms, the holes being positioned at edges of the region separating the micromirror and the wafer on both the side of the micromirror and the side of the portions of the wafer remaining after the anisotropic etching step. The invention also concerns the micromirror.