Patents by Inventor Farahmand E Askarinam

Farahmand E Askarinam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma reactor having RF power applicator and a dual-purpose window
    Patent number: 6790311
    Abstract: In a plasma reactor including a reactor chamber, a workpiece support for holding a workpiece inside the chamber during processing and an inductive antenna, a window electrode proximal a wall of the chamber, the antenna and wall being positioned adjacently, the window electrode being operable as (a) a capacitive electrode accepting RF power to capacitively coupled plasma source power into the chamber, and (b) a window electrode passing RF power therethrough from said antenna into the chamber to inductively couple plasma source power into the chamber.
    Type: Grant
    Filed: October 30, 2001
    Date of Patent: September 14, 2004
    Inventors: Kenneth S Collins, Michael Rice, Farahmand E Askarinam, Douglas A Buchberger, Jr., Craig A Roderick
  • Plasma reactor having a dual mode RF power application
    Patent number: 6365063
    Abstract: In a plasma reactor including a reactor chamber, a workpiece support for holding a workpiece inside the chamber during processing and an inductive antenna, a window electrode proximal a wall of the chamber, the antenna and wall being positioned adjacently, the window electrode being operable as (a) a capacitive electrode accepting RF power to capacitively coupled plasma source power into the chamber, and (b) a window electrode passing Rf power therethrough from said antenna into the chamber to inductively couple plasma source power into the chamber.
    Type: Grant
    Filed: July 9, 1999
    Date of Patent: April 2, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Kenneth S Collins, Michael Rice, Farahmand E Askarinam, Douglas A Buchberger, Jr., Craig A Roderick