Abstract: A punctal plug or lacrimal insert comprising a microelectromechanical system pump and associated reservoir may be utilized to deliver precise dosages of an active agent into the eye though the tear film. The microelectromechanical system pump comprises four main components; namely, a reservoir, a pump, a series of valves and a vent. The microelectromechanical system pump is positioned within a cavity in the punctal plug. The microelectromechanical system pump is positioned with a cavity in the punctal plug.

Abstract: A punctal plug or lacrimal insert comprising a microelectromechanical system pump and associated reservoir may be utilized to deliver precise dosages of an active agent into the eye though the tear film. The microelectromechanical system pump comprises four main components; namely, a reservoir, a pump, a series of valves and a vent. The microelectromechanical system pump is positioned within a cavity in the punctal plug. The microelectromechanical system pump is positioned with a cavity in the punctal plug.

Abstract: A method of forming free standing microstructures includes providing a substrate and forming a sacrificial layer on the substrate. A thin-film structural layer is then formed around and over the sacrificial layer. The sacrificial layer may be formed from an electrically conductive or non-electrically conductive material in certain embodiments of the invention. Nanometer-scale pores are then introduced through the thin-film structural layer by a non-lithographic method, such as anodic etching. Via the pores, at least a portion of the sacrificial layer is etched away or otherwise removed from underneath the thin-film structural layer. The free standing microstructures may be sealed by application of a sealing layer on top thereof. The microstructure may form an encapsulating cavity and provide integrated on-wafer packaging if separate microdevices are disposed inside the cavity. The entire process may be done at or near room temperature in some cases.