Abstract: The present invention discloses a technique of removing a substance from a substrate surface, such as stripping photoresist from a wafer, or forming a substance on a substrate surface. Substrates to be treated are parallel arranged at an equal interval and are immersed in a liquid with only a lower portion thereof being below the liquid surface. Gas such as ozone is introduced into the liquid and is continuously bubbling below the substrates. The bubbles will ascend between two adjacent substrates and climb on the surfaces of the substrates before they burst. The liquid boundary layers on the substrate surfaces are compressed and refreshed in the course of a dragging ascent of the bubbles, enhancing mass transfer between gas/liquid/solid substances across the liquid boundary layer, thereby resulting in a fast reaction and a fast treatment of the surface of the substrates.

Abstract: In order to reduce a total organic carbon (TOC) in ultrapure water to a level less than 1 ppb, several cycles of ozone contact/UV irradiation treatments are carried out in sequence. Preferably, the first cycle further includes an ion exchange treatment which is applied to the resulting UV irradiation water.

Abstract: In order to reduce a total organic carbon (TOC) in ultrapure water to a level less than 1 ppb, several cycles of ozone contact/UV irradiation treatments are carried out in sequence. Preferably, the first cycle further includes an ion exchange treatment which is applied to the resulting UV irradiation water.

Abstract: The present invention discloses a technique of removing a substance from a substrate surface, such as stripping photoresist from a wafer, or forming a substance on a substrate surface. Substrates to be treated are parallel arranged at an equal interval and are immersed in a liquid with only a lower portion thereof being below the liquid surface. Gas such as ozone is introduced into the liquid and is continuously bubbling below the substrates. The bubbles will ascend between two adjacent substrates and climb on the surfaces of the substrates before they burst. The liquid boundary layers on the substrate surfaces are compressed and refreshed in the course of a dragging ascent of the bubbles, enhancing mass transfer between gas/liquid/solid substances across the liquid boundary layer, thereby resulting in a fast reaction and a fast treatment of the surface of the substrates.

Abstract: A composite exhaust filter particularly for use in diesel engine powered vehicles includes first and second filter sections disposed in series. The first filter section is a high-temperature depth-type filter material capable of collecting exhaust particulates with moderate efficiency while the second filter section is a high-temperature ceramic wall-flow monolith capable of collecting exhaust particulates on an extended gas porous surface with high efficiency. The vehicle system is provided with means such as an inlet throttle for increasing exhaust gas temperature to the ignition point of the collected particulates. Combustion initiated in the depth type first filter section generates a substantial amount of added heat which is carried to the second filter section, raising the surface temperature to a point where the particulates in the latter section are also incinerated.

Abstract: A diesel exhaust particulate filter contains a high temperature depth type filter material arranged in a reflexive path throughout which diesel particulates are collected from engine exhaust gases passed therethrough. Upstream and downstream portions of the filter flow path are disposed in heat exchange relation. Upon heating of the incoming gases to the incineration temperature of collected particulates, the heat of combustion in the downstream portion will be partially transferred to the upstream portion, providing more even temperature levels and improving balance of the incineration process.