Patents by Inventor Farro Frank Kaveh

Farro Frank Kaveh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for pressure control in vacuum processors
    Patent number: 5803107
    Abstract: A method and apparatus is disclosed for controlling the pressure of reaction chamber in wafer processing equipment. The disclosed apparatus and method uses a ballast port for inserting gas into the evacuation system, thereby controlling the pressure in the reaction chamber. The disclosed apparatus and method further uses estimation curves to estimate the desired position of a controlled gate valve which is located between the reaction chamber and turbo pump. The disclosed apparatus and method further introduces process gases at higher rate than set point levels to reduce the transition time or stabilization time required when raising the pressure in the reaction chamber.
    Type: Grant
    Filed: March 29, 1996
    Date of Patent: September 8, 1998
    Assignee: Lam Research Corporation
    Inventors: Farro Frank Kaveh, Michael S. Barnes, Brett C. Richardson, Christopher H. Olson
  • Method and apparatus for pressure control in vacuum processors
    Patent number: 5758680
    Abstract: A method and apparatus is disclosed for controlling the pressure of reaction chamber in wafer processing equipment. The disclosed apparatus and method uses a ballast port for inserting gas into the evacuation system, thereby controlling the pressure in the reaction chamber. The disclosed apparatus and method further uses estimation curves to estimate the desired position of a controlled gate valve which is located between the reaction chamber and turbo pump. The disclosed apparatus and method further introduces process gases at higher rate than set point levels to reduce the transition time or stabilization time required when raising the pressure in the reaction chamber.
    Type: Grant
    Filed: March 29, 1996
    Date of Patent: June 2, 1998
    Assignee: Lam Research Corporation
    Inventors: Farro Frank Kaveh, Michael S. Barnes, Brett C. Richardson, Christopher H. Olson