Abstract: Equipment front end module (EFEM) systems and methods for handling workpieces at EFEMs are disclosed. An equipment front end module (EFEM) system has an enclosure and a robot within the enclosure. The enclosure has two or more load ports, each being adapted to receive a front opening unified pod (FOUP). The robot is configured to move work pieces between the FOUP(s) and one or more work piece processing tools proximate the enclosure. The load ports are positioned relative to said robot such that said robot can move the work pieces between the tool and a FOUP at each load port with a simple R-theta motion or pure linear motion with respect to two axes.

Abstract: The invention provides method and apparatus for materials processing that enable the concentration and identity of a constituent of an excited gaseous materials processing medium to be selected relatively independently of the concentration and identity of other constituents of the same medium. Individual constituents are generated at distinct, separate locations, such as separate chambers, under different process conditions; one or more of the temperature, pressure, power exposure, gas composition and local reactor geometry, selected to optimize generation of a specific constituent, are different at the two locations. Then the individual constituents are combined and brought into contact with the substrate to be treated. In another aspect, the invention allows for the generation of the entire excited portion of a processing medium at a single location distinct from the site of substrate treatment in order to weaken the coupling between the generation of the medium and its application.

Abstract: A method and apparatus for positioning substrates is provided. The substrates are typically semiconductor wafers that require centering on a mounting location within a process module and orientation of a notch, flat or perimeter interruption to a known rotational position. A robot arm transfers wafers from a source to the process module. A camera is provided adjacent a path of travel of the robot arm to scan the wafers as they pass thereover. A grayscale analysis determines the centroid, or other reference point, of the wafer and the location of the notch or flat. The path of travel of the arm is altered to account for misalignment of the centroid/reference point from a known location. Data related to the rotational offset of the notch or flat relative to a known standard location is also obtained. The wafer can be rotated to position the notch or flat at a desired standard position using a rotator mounted on the robot arm or at a remote site.

Abstract: A method of making textile glass fibers in a rotary process is disclosed. A spinner bearing molten glass rotates on its axis of rotation. Glass is forced through orifices and the resulting fibers are moved along paths generally perpendicular to the axis of rotation. Prior to commingling or turn down of the fibers a quenching liquid is applied to the fibers.

Abstract: A method and apparatus for making glass fibers comprises a burner creating an annular jet of high-temperature, high-velocity gases and an orificed spinner mounted for rotation within the jet where the circumferential rows of orifices on the spinner peripheral wall are grouped in bands, with the bands being spaced apart by blank areas on a spinner peripheral wall, and the orifices increasing in size from the bottom band to the top band.

Abstract: A downwardly moving cylindrical veil of mineral fibers is distributed to form a mineral fiber product by impinging on the interior of the veil jets of gas from an internal blower positioned within the veil to increase the angular velocity of the veil, thereby causing the veil tobreak up into an incoherent flow of mineral fibers.

Abstract: An apparatus for fiberizing molten mineral material is disclosed. The apparatus includes a spinner to fiberize the material into fibers, a high velocity blower to attenuate the fibers, an air gap between the spinner and the high velocity blower through which ambient air is drawn and a flow controller over a portion of the air gap to redirect flow of the ambient air.

Abstract: A method for making mineral fibers comprising discharging molten glass as primary molten streams from orifices and joining at least one primary stream to an adjacent primary stream to form a coalesced stream of different cross-sectional shape from that of the orifices, and hardening the coalesced stream into a glass fiber having a cross-sectional shape similar to the shape of the coalesced stream.

Abstract: Apparatus for producing mineral fibers comprises a spinner mounted for rotation to centrifuge mineral fibers from molten mineral material, an annular blower positioned concentrically outwardly from the spinner for turning the mineral fibers downwardly and inducing a downward flow of air around the spinner, and an airfoil mounted above the blower to provide a downwardly converging annular passageway above the blower for the induced air, the blower and the airfoil forming a substantially continuous curved surface, being curved radially inwardly at the blower.

Abstract: An annular blower for attenuating fibers comprises an annular manifold and a plurality of slots positioned circumferentially around the blower for the discharge of attenuating gas from the manifold, where the slots have an aspect ratio within the range of from about 35 to about 70.